BALZERS DIF 400 Products

  • BALZERS: BFA 400 MF

    Details
    ID#:
    9048071
    Category:
    Spare Parts
    Combination baffle | P/N: PT B03 503.
  • BALZERS: DIF 250

    Details
    ID#:
    83528
    Category:
    Pumps
    Diffusion pump.
  • BALZERS: DIF 500A

    Details
    ID#:
    9061848
    Category:
    Pumps
    Diffusion pump.
  • PFEIFFER / BALZERS: QMA 400

    Details
    ID#:
    136849
    Category:
    Pumps
    Faraday cup | | Specifications: | Mass analyzer | Ion source | Filter | Ion detector | Flange with all feedthroughs | | Requires RF generator and QMS 420 operating console.
  • BALZERS: BAF 400

    Details
    ID#:
    9016405
    Category:
    Etchers / Ashers
    Freeze etching system | Turbo pump.
  • BALZERS: DIF 160 ISO160

    Details
    ID#:
    9081519
    Category:
    Pumps
    Diffusion pump, 1,100 l/s.
  • BALZERS: DIF 250

    Details
    ID#:
    31327
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 500A

    Details
    ID#:
    75060
    Category:
    Pumps
    diffusion pump, ISO 500. 11,500 l/s. Unit weight: 396 lbs.
  • BALZERS: DIF 040W KF40

    Details
    ID#:
    9081516
    Category:
    Pumps
    Diffusion pump 40 l/s.
  • BALZERS: DIF 160

    Details
    ID#:
    31326
    Category:
    Pumps
    Diffusion pump.
  • BALZERS: BAF 301D

    Details
    ID#:
    70883
    Category:
    Etchers / Ashers
    Freeze-etching system for TEM sample preparation, with 19" tall x 15" wide vacuum chamber with tapered rear wall. 18" deep at bottom & 13" deep at top, with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF and ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4, 8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided.
  • UNAXIS / BALZERS: LLS 502

    Details
    ID#:
    112177
    Category:
    Sputtering Systems
    Wafer Size:
    4" 
    Sputtering systems, 4" | | Specifications: | | Main body: | Model: Balzers LLS 502, 3x400/230V 50/60Hz | (2) CT8F cryo pumps | (1) DU0030 Lotary pump | | Substrate holder: | 3 type of Balzers substrates can be used: | 4" dia X 0.5mmt | 4" dia X 1.2mmt | 4" dia X 2.0mmt | | Gas box: | For Sputter, 1 x MFC: Ar. 500 sccm | For Etching, 2 x MFC: Ar. 20/50 sccm | For Slow Vent, 1 x MFC: N2. 5000 sccm | | DC-PM cathode: | Model: (5) Balzers AK515 | Cathode Length : 5" x 15" | Stack sputter | | DC Cathode power: | Model: Advanced Energy MDC 5KX | Maximum Power : 5KW | | (4) Magnet systems: | (3) Balzers MB 515 For Cu. Cr. Ti. | (1) Balzers MC 515 For PamaAroi, Ni80/Fe20 | | Substrate Heating Heaters: | Balzers MCC Ni50/Fe50 | For Load Block chamber: | Quartz Ramp Heater | Heater Capacity : 2 KW | Maximum Temperature : 200 Degree | For Process chamber : | Quartz Ramp Heater | Heater Capacity : 4 KW | Maximum Temperature : 400 Degree | | Ion Beam Etching System For Load Lock chamber: | Model: Inotech Linia Ion gun | Length : 6.0 x 30.0cm | Acceleration Voltage : 0-1000 V | Beam Current : 300mA | Ar Gas flow : 10 sccm | Working distance : 28 / 29cm | Cooling Method | Power : MPS500IPBN | New Driver | | Chamber Cover: Balzers stainless steel | | Transformer trance: Yamamitu Denki | 1st : 3 layers 200V 3phases | 2nd : 3 layers 400/230V 5phases | Capacity : 40KVA | Length : about 700W x 700D x 780H | | Target material: | Length : 5" x 15" | Material : Ti, Cu, Cr, FeNi | | Chiller unit: Miura Zimusyo | | Maintenance hoist: Balzers | | DC Bias: Above 150V | | Poli code: PFC 400 | Power : 3 layers 200V 3Ph 16A | Capacity : 3.2 KVA | cooling Water : 3.8 lpm / 18 degree | (1) DC pulsed, 5KW | (1) RF, 3KW | | Currently de-installed and warehoused | Decommissioned in 2007 | 1995-1996 vintage.
  • BALZERS: BAK 760

    Details
    ID#:
    9071169
    Category:
    Evaporators
    Evaporator | E-beam and substrate heating | | Compact High Vacuum Coater | (1) Rotary drive motor | (1) Substrate holder 4" | (1) High-Vac plate valve DN 500 mm | (1) Fore-vacuum valve | (1) Bypass valve | (1) Vent valve for N2 | (1) Chevron | Vacuum measurement cells: Leybold 1 | (2) TPR280 foreline and high vac pump | PKR251 Chamber | | Vacuum Pumps | Medium pump stand | EDWARDS GV80 EH 500 Dry pump/Roots blower 250 m3/h | DUO + ROOTS, with test | Hi vacuum pump | Diff 500 A with baffle: Balzers | | Water battery for cold water distribution | Cold-water 20°C | Flow meter on each line | | EMO | High safety devices | Door monitor | | Balzers High Voltage Cabinet EHV110 | EKS 110 / ETS 110 rack | HV EHV110 | (1) E-Gun: Balzers ESQ 110 | Shutter | EDE 110 Servomotor | EHS 110 Filament transformers | Source with 4-hole crucible | | Control Cabinet | PLC Siemens S7 | Visualisation Siemens WinCC flexible | Windows PC 17- 19” TFT | Programmable start | Automatic/manual vacuum control | Disengagable interlocks | Display of the vacuum values | Visualisation of the system status | Data log | Leak rate test function | Password controlled access – free setting of user | Groups (for example engineer, service, operator aso.) | | Deposition Controller | Inficon Maxtek, XTC/2 or eq. | (1) Single quartz sensor - connected to single crystal oscillator | Vacuum feedthrough | | Options available: | Protection shields | Heater | E-Beam (new) | Thermal evaporator, 3.5 kW | Glow discharge | Ion gun: K&R | | CE Marked | 3 x 400 VAC, 63 A, 3 Ph+N+NE, 50 Hz.
  • BALZERS: BA 510

    Details
    ID#:
    186817
    Category:
    Evaporators
    Bell jar system | (3) Thermal Sources | Shutters | 510mm Diameter | Pump system | -Diffusion pump Balzers Diff 200 | -Balzers Buffle BFA 200 | -Freon compressor PW3K7 with R413A | -Pfeiffer rotary pump DUO 030A | -n°2 Balzers EVA 040P | -Balzers vent valve EVM016 | -Balzers high vacuum valve PVA 200PD with Throttle function | Instruments for vacuum controls | -Balzers TPG 070 with 3 TPR 010 | -Balzers IKW 010 with IKG 020 with set points for run process | -PC 101 for automatic pumping control | Process Systems | -Balzers BPU 100 automatic systems process control for n°4 sources and 36 layers. | -Quarz Monitor Balzers QM101 With head QSK 300 | -N° 2 thermal source working with automatic system BPU and thyristor Eurotherm | -Automatic Balzers shutter for both sources | -Automatic rotary system BD104 | Electrical System | -3P-N-GND 380V for 50hz | -EEO 101 safety stop | -ERE 101 connection box | -EPC 301 distribution power box | -Water cool valves and flows switches | -Electrical and water predisposition for E-Gun | Includes operation and maintenance manuals. |
  • PFEIFFER / BALZERS: TPU 170

    Details
    ID#:
    9094727
    Category:
    Pumps
    Turbo molecular pump | ISO100 Inlet Flange, KF25 Outlet Flange | Pumping speed: for N2 170 l/s | Ultimate pressure with rotary vane pump < 1x10-10 mbar | Air or Water Cooling available | Pump equipped with two ceramic bearings | The installation attitude can be selected from vertical to horizontal | Pfeiffer Balzers TCP -310 Turbo Pump controller not included.
  • BALZERS: 1000

    Details
    ID#:
    9095515
    Category:
    Evaporators
    Wafer Size:
    40" 
    Evaporator, 40" | Temescal CV-14 power supply with controls | Polycold: PFC-50011ST | (1) Schreiber 10T (5+5) Chiller: dual compressor, 400 V | (1) Neslab Chiller: 38 kW, 400 V | DP | Mechanical pump | Blower | Currently non-operational.
  • PFEIFFER / BALZERS: TPU 240

    Details
    ID#:
    9094724
    Category:
    Pumps
    Turbo pump | Pumping speed: for N2 230 l/s | Ultimate pressure with rotary vane pump 1x10-10 mbar | Recommended Backing Pump 1.5-16 m3 | Air or Water Cooling available | Turbo Pump part number: P01 330 | The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side | Turbo pump designed for a wide range of applications in research industry | Pfeiffer Balzers controller not included.
  • UNAXIS / BALZERS: 1131

    Details
    ID#:
    9091440
    Category:
    Evaporators
    Large Box Coater Evaporation System | | Specifications: | Khan NT controller | Dual CTI-400 cryo pumps | Box Size: 48" L x 59" at widest point x 63" H | Currently configured with inductive thermal evaporation source | Can be configured with other types of evaporation sources | System includes autoload option | 2001 vintage.
  • BALZERS: BA 510

    Details
    ID#:
    35733
    Category:
    Evaporators
    Vacuum evaporator | | Includes | Stainless water traced bell jar (20" x 25") | (2) Viewports on a 22" OD stainless steel baseplate with hydraulic hoist | (2) High current feedthroughs | Pumping system: DIF200 diffusion pump, 2000 l/s | Water cooled baffe: Balzers BFA200W | Electropneumatic valves | Vacuum system controller: Balzers PC101 | Direct drive mechanical roughing pump: Balzers DUO030A, 26.5 cfm | Evaporative systems: Filament transformer | Manual shutter with motorized horizontal substrate rotation | Digital cold cathode: Balzers PKG100 | Pirani gauge.
  • BALZERS: UMS 500

    Details
    ID#:
    144768
    Category:
    Evaporators
    Special Ultra High Vacuum System | With a pressure < 3x 10e-11mbar | (1) Balzers Electron Beam Power Supply EHV 110A | (2) Balzers Electron Gun Control EKS 110A | (1) Balzers RTC 110 Rate Controller | (2) Balzers ES300 E-Guns | (1) Balzers Ion Gauge Control IMG 070 | (1) Balzers Sublimation Control USS 110 | (1) Balzers UMS Control UMC 101 | (1) Pfeifer Turbo Pump Power Supply TCP 300 | (1) Balzers Heater Control Unit UAS 301 | (1) Advanced Energy ID 2500 Ion Beam Drive | (1) Ion Beam Source | (1) Balzers Quadrupole Mass Spectrometer QMG511 | (1) Varian TSP control Unit Model VT922-0052 | (1) Balzers Temperature Control Unit 0° to 400°C | | Water Distributor Rack | | Includes Documentation with drawing and schematics.
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