BALZERS DIF 400 Products

  • BALZERS: DIF 500A

    Details
    ID#:
    75060
    Category:
    Pumps
    diffusion pump, ISO 500. 11,500 l/s. Unit weight: 396 lbs.
  • PFEIFFER / BALZERS: QMA 400

    Details
    ID#:
    136849
    Category:
    Pumps
    Faraday cup | | Specifications: | Mass analyzer | Ion source | Filter | Ion detector | Flange with all feedthroughs | | Requires RF generator and QMS 420 operating console.
  • BALZERS: BAF 400

    Details
    ID#:
    9016405
    Category:
    Etchers / Ashers
    Freeze etching system | Turbo pump.
  • BALZERS: DIF 250

    Details
    ID#:
    83528
    Category:
    Pumps
    Diffusion pump.
  • BALZERS: DIF 500A

    Details
    ID#:
    9061848
    Category:
    Pumps
    Diffusion pump.
  • BALZERS: BFA 400 MF

    Details
    ID#:
    9048071
    Category:
    Spare Parts
    Combination baffle | P/N: PT B03 503.
  • BALZERS: DIF 160

    Details
    ID#:
    31326
    Category:
    Pumps
    Diffusion pump.
  • BALZERS: DIF 250

    Details
    ID#:
    31327
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 040W KF40

    Details
    ID#:
    9081516
    Category:
    Pumps
    Diffusion pump 40 l/s.
  • BALZERS: DIF 160 ISO160

    Details
    ID#:
    9081519
    Category:
    Pumps
    Diffusion pump, 1,100 l/s.
  • UNAXIS / BALZERS: LLS 502

    Details
    ID#:
    112177
    Category:
    Sputtering Systems
    Wafer Size:
    4" 
    Sputtering systems, 4" | | Specifications: | | Main body: | Model: Balzers LLS 502, 3x400/230V 50/60Hz | (2) CT8F cryo pumps | (1) DU0030 Lotary pump | | Substrate holder: | 3 type of Balzers substrates can be used: | 4" dia X 0.5mmt | 4" dia X 1.2mmt | 4" dia X 2.0mmt | | Gas box: | For Sputter, 1 x MFC: Ar. 500 sccm | For Etching, 2 x MFC: Ar. 20/50 sccm | For Slow Vent, 1 x MFC: N2. 5000 sccm | | DC-PM cathode: | Model: (5) Balzers AK515 | Cathode Length : 5" x 15" | Stack sputter | | DC Cathode power: | Model: Advanced Energy MDC 5KX | Maximum Power : 5KW | | (4) Magnet systems: | (3) Balzers MB 515 For Cu. Cr. Ti. | (1) Balzers MC 515 For PamaAroi, Ni80/Fe20 | | Substrate Heating Heaters: | Balzers MCC Ni50/Fe50 | For Load Block chamber: | Quartz Ramp Heater | Heater Capacity : 2 KW | Maximum Temperature : 200 Degree | For Process chamber : | Quartz Ramp Heater | Heater Capacity : 4 KW | Maximum Temperature : 400 Degree | | Ion Beam Etching System For Load Lock chamber: | Model: Inotech Linia Ion gun | Length : 6.0 x 30.0cm | Acceleration Voltage : 0-1000 V | Beam Current : 300mA | Ar Gas flow : 10 sccm | Working distance : 28 / 29cm | Cooling Method | Power : MPS500IPBN | New Driver | | Chamber Cover: Balzers stainless steel | | Transformer trance: Yamamitu Denki | 1st : 3 layers 200V 3phases | 2nd : 3 layers 400/230V 5phases | Capacity : 40KVA | Length : about 700W x 700D x 780H | | Target material: | Length : 5" x 15" | Material : Ti, Cu, Cr, FeNi | | Chiller unit: Miura Zimusyo | | Maintenance hoist: Balzers | | DC Bias: Above 150V | | Poli code: PFC 400 | Power : 3 layers 200V 3Ph 16A | Capacity : 3.2 KVA | cooling Water : 3.8 lpm / 18 degree | (1) DC pulsed, 5KW | (1) RF, 3KW | | Currently de-installed and warehoused | Decommissioned in 2007 | 1995-1996 vintage.
  • BALZERS: BAK 760

    Details
    ID#:
    9071169
    Category:
    Evaporators
    Evaporator | E-beam and substrate heating | | Compact High Vacuum Coater | (1) Rotary drive motor | (1) Substrate holder 4" | (1) High-Vac plate valve DN 500 mm | (1) Fore-vacuum valve | (1) Bypass valve | (1) Vent valve for N2 | (1) Chevron | Vacuum measurement cells: Leybold 1 | (2) TPR280 foreline and high vac pump | PKR251 Chamber | | Vacuum Pumps | Medium pump stand | EDWARDS GV80 EH 500 Dry pump/Roots blower 250 m3/h | DUO + ROOTS, with test | Hi vacuum pump | Diff 500 A with baffle: Balzers | | Water battery for cold water distribution | Cold-water 20°C | Flow meter on each line | | EMO | High safety devices | Door monitor | | Balzers High Voltage Cabinet EHV110 | EKS 110 / ETS 110 rack | HV EHV110 | (1) E-Gun: Balzers ESQ 110 | Shutter | EDE 110 Servomotor | EHS 110 Filament transformers | Source with 4-hole crucible | | Control Cabinet | PLC Siemens S7 | Visualisation Siemens WinCC flexible | Windows PC 17- 19” TFT | Programmable start | Automatic/manual vacuum control | Disengagable interlocks | Display of the vacuum values | Visualisation of the system status | Data log | Leak rate test function | Password controlled access – free setting of user | Groups (for example engineer, service, operator aso.) | | Deposition Controller | Inficon Maxtek, XTC/2 or eq. | (1) Single quartz sensor - connected to single crystal oscillator | Vacuum feedthrough | | Options available: | Protection shields | Heater | E-Beam (new) | Thermal evaporator, 3.5 kW | Glow discharge | Ion gun: K&R | | CE Marked | 3 x 400 VAC, 63 A, 3 Ph+N+NE, 50 Hz.
  • BALZERS: BAF 301D

    Details
    ID#:
    70883
    Category:
    Etchers / Ashers
    Freeze-etching system for TEM sample preparation, with 19" tall x 15" wide vacuum chamber with tapered rear wall. 18" deep at bottom & 13" deep at top, with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF and ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4, 8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided.
  • BALZERS: BAK 600

    Details
    ID#:
    161695
    Category:
    Evaporators
    Batch coating system | Capable of handling ~(8) 6" wafers at once | Includes: | BALZERS HGG700 HV transformer | BSG 301 control unit for HGG 700 (0-400 mA) | RVE 016 gas inlet valve DN 10 KF (flange) | High voltage feedthrough | Vacuum switch | High voltage cable | Connection cable HGG J2 - BSG J3 (4m) | Connection cable HGG J3 - BSG J1 (4m) | Vacuum monitor (4m).
  • UNAXIS / BALZERS: BAK EVO 760

    Details
    ID#:
    183631
    Category:
    Evaporators
    Vintage:
    2001 
    Multiple Source Thermal Evaporator | Configured with 3 shutters and 8 water cooled power feed throughs | 3 Inficon XTC crystal deposition monitors each controlled via Khan computer | Substrate carrier for 8 in. dia. substrates | Khan process control with user friendly graphics | Fully integrated multi-tasking PC-based control system | CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down | 2001 vintage. |
  • BALZERS: 1000

    Details
    ID#:
    9095515
    Category:
    Evaporators
    Wafer Size:
    40" 
    Evaporator, 40" | Temescal CV-14 power supply with controls | Polycold: PFC-50011ST | (1) Schreiber 10T (5+5) Chiller: dual compressor, 400 V | (1) Neslab Chiller: 38 kW, 400 V | DP | Mechanical pump | Blower | Currently non-operational.
  • PFEIFFER / BALZERS: TPU 170

    Details
    ID#:
    9094727
    Category:
    Pumps
    Turbo molecular pump | ISO100 Inlet Flange, KF25 Outlet Flange | Pumping speed: for N2 170 l/s | Ultimate pressure with rotary vane pump < 1x10-10 mbar | Air or Water Cooling available | Pump equipped with two ceramic bearings | The installation attitude can be selected from vertical to horizontal | Pfeiffer Balzers TCP -310 Turbo Pump controller not included.
  • PFEIFFER / BALZERS: TPU 240

    Details
    ID#:
    9094724
    Category:
    Pumps
    Turbo pump | Pumping speed: for N2 230 l/s | Ultimate pressure with rotary vane pump 1x10-10 mbar | Recommended Backing Pump 1.5-16 m3 | Air or Water Cooling available | Turbo Pump part number: P01 330 | The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side | Turbo pump designed for a wide range of applications in research industry | Pfeiffer Balzers controller not included.
  • BALZERS: BAK 550

    Details
    ID#:
    159825
    Category:
    Evaporators
    Box coater | Small sputtering device in the top of the vacuum chamber | Hüttinger RF power supply with matchbox | (Type TIS05 & FPG300RF) | Advanced Energy DC power supply (Type PSS390) | Balzers IMG060B, Granville-Phillips 270D17 and MKS 127 Baratron vacuum measuring equipment | Balzers QMA 200 mass spectrometer system | Does not include: | Pre-vacuum | High vacuum pumping system | Operating voltage: 280 to 400 VAC, 50 Hz.
  • BALZERS: BAK 760 D

    Details
    ID#:
    9016971
    Category:
    Evaporators
    Coater | Vacuum pump UNO 100 | Roots pump WKP 500 | Diffusion pump DIF 500A | High vacuum valve PVA 500 | Baffle with cooling compressor BBA 500 | Meissner Cold trap with Polycold PFC 550ST | E-Gun with 1 x ESQ 110, EHV 110 and 1 x ESK 110 | Layer thickness controller QSK 310 (single quartz) | Rotary drive, with auto turn system and turn paddle or one carrier segment | (2) Resistant evaporating devices | Backside heater 9 KW | Incl. vacuum tubes and measuring devices | Controller BPU 420 G, PRO 420 and VAC 420, screen and keyboard.
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