BALZERS DIF 400 Products

  • UNAXIS / BALZERS: Sirius 400

    Details
    ID#:
    9046353
    Category:
    Evaporators
    Custom UHV CVD system | Used to deposit silicon germanium (SiGe) | Low temperature 500-600°C | Reactor tube (double-walled quartz) | Furnace around reactor tube heats up to ~700°C | Heating control, load lock, wafer boat detection and boat transfer system | (2) Leybold TW 701 turbo pumps (load lock and process tube) | (3) Scroll VAC SC-15D rough pumps (load lock, process tube and RGA) | (1) Ebara AA20N-H pump (process tube) | Siemens S7 400 Programmable logic controller | Control cabinet (separate from process unit) | Clean air module (flow box) | Abrupt dopant (n and p type) profiles and SiGe profiles capable | Process gases: Germane (GeH4), Silane (SiH4), Diborane (B2H6), Phosphine (PH3) and Hydogen (H2) | GeH4, B2H6, and PH3 are diluted in helium | Helium is used for purging | Base pressure: 8e-9 mbar | Pressure during film growth: ~5e-3 mbar | Background partial pressure contaminants: 1E-11 mbar (turbopump) | Lowest film growth rates: 1-5A/min enables high precision | Film thickness uniformity (wafer): +/-0.2% (molecular flow) | Boron doping range: 1e16 to 2e20 atoms/cm3 | Phosphorus doping range: Up to 1e20 atoms/cm3 | Sharp concentration profiles: 10^3/20A | Zero slip | Ge concentration range: 0-100% | Typical growth rate: 5-30A/min | Edwards dry scrubber (dual system D150), 3 Phase, 208 Volts | (2) Gas reactor columns, (1) can be changed while the tool is running.
  • PFEIFFER / BALZERS: QMA 400

    Details
    ID#:
    136849
    Category:
    Pumps
    Faraday cup | | Specifications: | Mass analyzer | Ion source | Filter | Ion detector | Flange with all feedthroughs | | Requires RF generator and QMS 420 operating console.
  • BALZERS: DIF 250

    Details
    ID#:
    31327
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 160

    Details
    ID#:
    31326
    Category:
    Pumps
    diffusion pump.
  • BALZERS: BFA 400 MF

    Details
    ID#:
    9048071
    Category:
    Spare Parts
    Combination baffle | P/N: PT B03 503.
  • BALZERS: DIF 500A

    Details
    ID#:
    9061848
    Category:
    Pumps
    Diffusion pump.
  • BALZERS: DIF 250

    Details
    ID#:
    83528
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 500A

    Details
    ID#:
    75060
    Category:
    Pumps
    diffusion pump, ISO 500. 11,500 l/s. Unit weight: 396 lbs.
  • UNAXIS / BALZERS: LLS 502

    Details
    ID#:
    112177
    Category:
    Sputtering Systems
    Wafer Size:
    4" 
    Sputtering systems, 4" | | Specifications: | | Main body: | Model: Balzers LLS 502, 3x400/230V 50/60Hz | (2) CT8F cryo pumps | (1) DU0030 Lotary pump | | Substrate holder: | 3 type of Balzers substrates can be used: | 4" dia X 0.5mmt | 4" dia X 1.2mmt | 4" dia X 2.0mmt | | Gas box: | For Sputter, 1 x MFC: Ar. 500 sccm | For Etching, 2 x MFC: Ar. 20/50 sccm | For Slow Vent, 1 x MFC: N2. 5000 sccm | | DC-PM cathode: | Model: (5) Balzers AK515 | Cathode Length : 5" x 15" | Stack sputter | | DC Cathode power: | Model: Advanced Energy MDC 5KX | Maximum Power : 5KW | | (4) Magnet systems: | (3) Balzers MB 515 For Cu. Cr. Ti. | (1) Balzers MC 515 For PamaAroi, Ni80/Fe20 | | Substrate Heating Heaters: | Balzers MCC Ni50/Fe50 | For Load Block chamber: | Quartz Ramp Heater | Heater Capacity : 2 KW | Maximum Temperature : 200 Degree | For Process chamber : | Quartz Ramp Heater | Heater Capacity : 4 KW | Maximum Temperature : 400 Degree | | Ion Beam Etching System For Load Lock chamber: | Model: Inotech Linia Ion gun | Length : 6.0 x 30.0cm | Acceleration Voltage : 0-1000 V | Beam Current : 300mA | Ar Gas flow : 10 sccm | Working distance : 28 / 29cm | Cooling Method | Power : MPS500IPBN | New Driver | | Chamber Cover: Balzers stainless steel | | Transformer trance: Yamamitu Denki | 1st : 3 layers 200V 3phases | 2nd : 3 layers 400/230V 5phases | Capacity : 40KVA | Length : about 700W x 700D x 780H | | Target material: | Length : 5" x 15" | Material : Ti, Cu, Cr, FeNi | | Chiller unit: Miura Zimusyo | | Maintenance hoist: Balzers | | DC Bias: Above 150V | | Poli code: PFC 400 | Power : 3 layers 200V 3Ph 16A | Capacity : 3.2 KVA | cooling Water : 3.8 lpm / 18 degree | (1) DC pulsed, 5KW | (1) RF, 3KW | | Currently de-installed and warehoused | Decommissioned in 2007 | Can be inspected | 1995-1996 vintage.
  • BALZERS: BAF 301D

    Details
    ID#:
    70883
    Category:
    Etchers / Ashers
    Freeze-etching system for TEM sample preparation, with 19" tall x 15" wide vacuum chamber with tapered rear wall. 18" deep at bottom & 13" deep at top, with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF and ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4, 8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided.
  • BALZERS: BAK 760 D

    Details
    ID#:
    9016971
    Category:
    Evaporators
    Coater | Vacuum pump UNO 100 | Roots pump WKP 500 | Diffusion pump DIF 500A | High vacuum valve PVA 500 | Baffle with cooling compressor BBA 500 | Meissner Cold trap with Polycold PFC 550ST | E-Gun with 1 x ESQ 110, EHV 110 and 1 x ESK 110 | Layer thickness controller QSK 310 (single quartz) | Rotary drive, with auto turn system and turn paddle or one carrier segment | (2) Resistant evaporating devices | Backside heater 9 KW | Incl. vacuum tubes and measuring devices | Controller BPU 420 G, PRO 420 and VAC 420, screen and keyboard.
  • BALZERS: Lot of

    Details
    ID#:
    9055198
    Category:
    Spare Parts
    Spare parts. | | | QTY | PART NUMBER | MODEL | DESCRIPTION | (1) B 5123 203AA TB-BA-4/220-160/S DC MOTOR AMPLIFIER / CONTROL PCB | (1) BG 542 380-T TB-BA-4/220-160/S DC MOTOR AMPLIFIER / CONTROL PCB | (1) BG 542 380-T TB-BA-4/220-160/S DC MOTOR AMPLIFIER / CONTROL PCB | (1) B 5278 853 PH-E LSI 11/23 M8186 MICRPROCESSOR MODULE, DEC, PCB - PRO 420 / VAC 420 | (1) B 5278 865 FC MXV 22M MXV-DISC DRIVE CONTROL MODULE, MTI PCB - PRO 420 | (1) BG 512 780-T/F MM 420 MULTIFUNCTION MODULE, PCB - PRO 420 | (1) BG 512 800-T IA 420 ANALOGUE I/O MODULE, PCB - PRO 420 | (1) BG 440 500-BT RV 420 GAS CONTROL MODULE (2CH), PCB - PRO 420 | (1) BG 541 175-S PI 420 PIRANI MODULE, PCB - VAC 420 | (1) BG 545 470-T EE 420 EMISSION CONTROL MODULE, PCB - EEC 420 | (1) B 4787 149HA 2 OM 3 RELAY OUTPUT MODULE, MURRELECTRONIC, 16 WAY, DIN RAIL MOUNT - ST 700 / PRO 420 | (1) B 5181 830 1D EHV 215 - U5 AUXILLARY POWER SUPPLY, PCB, EHV 215 | (1) B 5181 8302B ECS 200 DEFLECTION POWER AMPLIFIER, PCB - ECS 200 | (1) BG 543 048-T HGG 700/2000 GLOW DISCHARGE MEASUREMENT BOARD, PCB - HGG 700/2000 | (1) BG 527 050U EXT CARD EXTENDER BOARD, PCB - BPU 100 | (5) B 4079 155 P ESQ 110 L RING GASKET, 14/24x7mm | (1) BG 545 110-T ESQ 212 POSITION BOARD, PCB - ESQ 212 EB GUN | (1) BB 166 761-T ESQ 212 EBGUN BODY, END PLATE, HIGH PURITY COPPER, ESQ 212 | (1) BK 203 525 ESQ 212 GEARED WHEEL - ESQ 212 | (2) B 4317 145 AF ESQ 212 WORM WHEEL B05100 1r0, 5x100mm | (2) B 4316 100 AF ESQ 212 WORM, ETG100, S 5H1R 1r-0.5 | (1) QSK 610 / 610A QSK QUARTZ MEASURING HEAD, BODY ONLY, INCOMPLETE | (2) BG 524 181 QSK 610 / 610A DISC - QSK 610 / A | (1) BG 524 142-X QSK 610 / 610A PICK UP SHOE, GOLD - QSK 610 / A | (5) BG 542 191 QSK 610 / 610A CONNECTION STRIP, GOLD - QSK 610 / A | (1) QSK 610 / 610A OUTER CONTACT STRIP, GOLD - QSK 610 / A | (2) BG 524 149 QSK 610 / 610A CAP LOCKING PIN, QSK 610 / A | (1) BG 4524 138 UA QSK 610 / 610A QUARTZ MAGAZINE, COMPLETE - QSK 610 / A | (1) BG 524 139 T QSK 610 / 610A QUARTZ COVER, COMPLETE - QSK 610 / A | (1) BG 543 848-T QSK 610A QSK CONTROL BOARD, PCB - QSK 610-A | (1) RBG 543 848-T QSK 610A QSK CONTROL BOARD, PCB - QSK 610-A (RTC SYSTEMS VERSION) | (1) B 4082 210 F BD-104 Felt Ring 16/28x6 - BD-104 ROTARY DRIVE | (1) B 4079658PF EHV 110 A TRIODE, BRIM SEAL, 100/130mm x 13mm - EHV 110A HV SUPPLY | (1) BG 202 762 EHV 110 A TRIODE SUPPORT RING - EHV 110A HV SUPPLY | (1) 3CW20000A7 EHV 110 A TRIODE , EIMAC, 3CW20000A7, WATER COOLED | (1) VIEWPORT ISO-F VIEWPORT, WELDING FILTER, SHUTTER, KIT - BALZERS BAK 760.
  • BALZERS: LFC 150

    Details
    ID#:
    150542
    Category:
    Etchers / Ashers
    Plasma chip carrier cleaner | Plasma-cleans carriers in standard magazines | De-installed | 3 x 400 V, 20 A, 60/60 Hz, 8.5 kVA | Water: 2-5 bar | Air: 5-8 bar | Nitrogen: 5-8 bar | Argon: 3-200 bar | 1999 vintage.
  • BALZERS: BA 510

    Details
    ID#:
    186817
    Category:
    Evaporators
    Bell jar system | (3) Thermal Sources | Shutters | 510mm Diameter | Pump system | -Diffusion pump Balzers Diff 200 | -Balzers Buffle BFA 200 | -Freon compressor PW3K7 with R413A | -Pfeiffer rotary pump DUO 030A | -n°2 Balzers EVA 040P | -Balzers vent valve EVM016 | -Balzers high vacuum valve PVA 200PD with Throttle function | Instruments for vacuum controls | -Balzers TPG 070 with 3 TPR 010 | -Balzers IKW 010 with IKG 020 with set points for run process | -PC 101 for automatic pumping control | Process Systems | -Balzers BPU 100 automatic systems process control for n°4 sources and 36 layers. | -Quarz Monitor Balzers QM101 With head QSK 300 | -N° 2 thermal source working with automatic system BPU and thyristor Eurotherm | -Automatic Balzers shutter for both sources | -Automatic rotary system BD104 | Electrical System | -3P-N-GND 380V for 50hz | -EEO 101 safety stop | -ERE 101 connection box | -EPC 301 distribution power box | -Water cool valves and flows switches | -Electrical and water predisposition for E-Gun | Includes operation and maintenance manuals. |
  • PFEIFFER / BALZERS: TPH 2200 SG

    Details
    ID#:
    191053
    Category:
    Pumps
    Turbo molecular pump | PFEIFFER / BALZERS TCP5000 controller.
  • PFEIFFER / BALZERS: WKP 6000 AM

    Details
    ID#:
    158906
    Category:
    Pumps
    Vintage:
    2008 
    Dry vacuum pump blower | No: PP W77 000 | Specifications: | Volume Flow Rate: Theor 6000 m3/h | Rotation Speed: 3000 1/min | Oil: P3 | Drive Power: 15kW | Input: 400 / 690 V 50Hz | Weight: 265KG | 2005 vintage | Motor Specifications: | 3~160M-2 | VDE: 0530 | IEC: 34-1 | I.P.55 / I.CI.F | Thermistor (PTC) Max: 2,5VDC 155°C | | 2008 vintage.
  • BALZERS: BAK 600

    Details
    ID#:
    161695
    Category:
    Evaporators
    Batch coating system | Capable of handling ~(8) 6" wafers at once | Includes: | BALZERS HGG700 HV transformer | BSG 301 control unit for HGG 700 (0-400 mA) | RVE 016 gas inlet valve DN 10 KF (flange) | High voltage feedthrough | Vacuum switch | High voltage cable | Connection cable HGG J2 - BSG J3 (4m) | Connection cable HGG J3 - BSG J1 (4m) | Vacuum monitor (4m).
  • BALZERS: BAK 640

    Details
    ID#:
    185716
    Category:
    Evaporators
    Evaporator | Booster pump frame: DUO 100 with WKP 250 | High vacuum pump: Diff 400 with baffle | Baffle cooling: with cooling device | Meissner trap: integrated, but no Polycold device | High vacuum valve: PVA 400 | Pre-vacuum and bypass valve: DN ISO 100 | Rotary drive: BD 104 with motor and vacuum rotary feed through | Cup holder: 2-part inclusive of 2 set segments with reversal holders for reversal system, or 2 set segments without insert ring | Electronic stream vaporizer: EV-M5 by Ferrotec with 4-cup interlock plate, capacity per position 8 cm3 | Thermal vaporizer: transformers are available, no electrodes | Electric drive available | Substrate heater: rear heating 6 kW | Layer thickness measurement: QSK 300 oscillating crystal measurement, single crystal | Machine control: fully automatic systems and process control BPU 420 E with monitor and keyboard | Monitor: TFT 17” monitor | Vapor protection sheets: 1 set | | (1) Ferotec 4 Pocket E-beam Gun | BPU 420 E controller.
  • BALZERS: HLT 160

    Details
    ID#:
    9014787
    Category:
    Leak Detectors
    Portable helium leak detectors | 1 test port free of oil back-streaming | Auto-ranging and autocalibration | No LN2 required | Remote keypad control | Transport cart with backing pump | Sensitivity to 2×10-11 mbar 1/s | BG Z04 750/690 | 110 V, 60 Hz, 600 VA | | Includes Balzers DUO-016B pump, 110 V.
  • BALZERS: BAK 550

    Details
    ID#:
    159825
    Category:
    Evaporators
    Box coater | Small sputtering device in the top of the vacuum chamber | Hüttinger RF power supply with matchbox | (Type TIS05 & FPG300RF) | Advanced Energy DC power supply (Type PSS390) | Balzers IMG060B, Granville-Phillips 270D17 and MKS 127 Baratron vacuum measuring equipment | Balzers QMA 200 mass spectrometer system | Does not include: | Pre-vacuum | High vacuum pumping system | Operating voltage: 280 to 400 VAC, 50 Hz.
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