BALZERS DIF 400 Products

  • BALZERS: BAF 400

    Details
    ID#:
    9016405
    Category:
    Etchers / Ashers
    Freeze etching system | Turbo pump.
  • BALZERS: DIF 500A

    Details
    ID#:
    75060
    Category:
    Pumps
    diffusion pump, ISO 500. 11,500 l/s. Unit weight: 396 lbs.
  • BALZERS: DIF 040W KF40

    Details
    ID#:
    9081516
    Category:
    Pumps
    Diffusion pump 40 l/s.
  • BALZERS: DIF 500A

    Details
    ID#:
    9061848
    Category:
    Pumps
    Diffusion pump.
  • BALZERS: DIF 160

    Details
    ID#:
    31326
    Category:
    Pumps
    Diffusion pump.
  • BALZERS: DIF 250

    Details
    ID#:
    31327
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 160 ISO160

    Details
    ID#:
    9081519
    Category:
    Pumps
    Diffusion pump, 1,100 l/s.
  • BALZERS: DIF 250

    Details
    ID#:
    83528
    Category:
    Pumps
    Diffusion pump.
  • PFEIFFER / BALZERS: QMA 400

    Details
    ID#:
    136849
    Category:
    Pumps
    Faraday cup | | Specifications: | Mass analyzer | Ion source | Filter | Ion detector | Flange with all feedthroughs | | Requires RF generator and QMS 420 operating console.
  • BALZERS: BFA 400 MF

    Details
    ID#:
    9048071
    Category:
    Spare Parts
    Combination baffle | P/N: PT B03 503.
  • BALZERS: BAF 301D

    Details
    ID#:
    70883
    Category:
    Etchers / Ashers
    Freeze-etching system for TEM sample preparation, with 19" tall x 15" wide vacuum chamber with tapered rear wall. 18" deep at bottom & 13" deep at top, with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF and ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4, 8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided.
  • BALZERS: BAK 760

    Details
    ID#:
    9071169
    Category:
    Evaporators
    Evaporator | E-beam and substrate heating | | Compact High Vacuum Coater | (1) Rotary drive motor | (1) Substrate holder 4" | (1) High-Vac plate valve DN 500 mm | (1) Fore-vacuum valve | (1) Bypass valve | (1) Vent valve for N2 | (1) Chevron | Vacuum measurement cells: Leybold 1 | (2) TPR280 foreline and high vac pump | PKR251 Chamber | | Vacuum Pumps | Medium pump stand | EDWARDS GV80 EH 500 Dry pump/Roots blower 250 m3/h | DUO + ROOTS, with test | Hi vacuum pump | Diff 500 A with baffle: Balzers | | Water battery for cold water distribution | Cold-water 20°C | Flow meter on each line | | EMO | High safety devices | Door monitor | | Balzers High Voltage Cabinet EHV110 | EKS 110 / ETS 110 rack | HV EHV110 | (1) E-Gun: Balzers ESQ 110 | Shutter | EDE 110 Servomotor | EHS 110 Filament transformers | Source with 4-hole crucible | | Control Cabinet | PLC Siemens S7 | Visualisation Siemens WinCC flexible | Windows PC 17- 19” TFT | Programmable start | Automatic/manual vacuum control | Disengagable interlocks | Display of the vacuum values | Visualisation of the system status | Data log | Leak rate test function | Password controlled access – free setting of user | Groups (for example engineer, service, operator aso.) | | Deposition Controller | Inficon Maxtek, XTC/2 or eq. | (1) Single quartz sensor - connected to single crystal oscillator | Vacuum feedthrough | | Options available: | Protection shields | Heater | E-Beam (new) | Thermal evaporator, 3.5 kW | Glow discharge | Ion gun: K&R | | CE Marked | 3 x 400 VAC, 63 A, 3 Ph+N+NE, 50 Hz.
  • BALZERS: BAK 600

    Details
    ID#:
    161695
    Category:
    Evaporators
    Batch coating system | Capable of handling ~(8) 6" wafers at once | Includes: | BALZERS HGG700 HV transformer | BSG 301 control unit for HGG 700 (0-400 mA) | RVE 016 gas inlet valve DN 10 KF (flange) | High voltage feedthrough | Vacuum switch | High voltage cable | Connection cable HGG J2 - BSG J3 (4m) | Connection cable HGG J3 - BSG J1 (4m) | Vacuum monitor (4m).
  • BALZERS: B 5278 885 PH

    Details
    ID#:
    9156398
    Category:
    Spare Parts
    PDP 11/23 Computer Processor Units (CPU) for BALZERS BAK 640 | DEC CPU for BPU420.
  • BALZERS: 1000

    Details
    ID#:
    9095515
    Category:
    Evaporators
    Wafer Size:
    40" 
    Evaporator, 40" | Temescal CV-14 power supply with controls | Polycold: PFC-50011ST | (1) Schreiber 10T (5+5) Chiller: dual compressor, 400 V | (1) Neslab Chiller: 38 kW, 400 V | DP | Mechanical pump | Blower | Currently non-operational.
  • BALZERS / EVATEC: BAK 760 C

    Details
    ID#:
    9137693
    Category:
    Evaporators
    Evaporator | (1) Chamber | System Controller Type: BPU431 | Software version: V04R26 | | Gas/ process controller: MKS 270 | Gas/ chemical analyzer: Balzers QMA400 | Line 1 Ar 200 sccm Unit | | (2) Zone lamp heater | T/C Configuration: inside process chamber | | Vacuum: | Pressure controller | Chamber Vacuum Pumps | Cryo Compressor | Foreline Pumps | | Power distribution unit | (2) Roughing pumps | Cryo compressor | EH215 | ECS200 | EFS200 | Electronics cabinet | Water battery | RF generator and matchbox | Loadarm calotte | | 3 phase, 50Hz, 400V 80A. |
  • BALZERS: BA 510

    Details
    ID#:
    35733
    Category:
    Evaporators
    Vacuum evaporator | | Includes | Stainless water traced bell jar (20" x 25") | (2) Viewports on a 22" OD stainless steel baseplate with hydraulic hoist | (2) High current feedthroughs | Pumping system: DIF200 diffusion pump, 2000 l/s | Water cooled baffe: Balzers BFA200W | Electropneumatic valves | Vacuum system controller: Balzers PC101 | Direct drive mechanical roughing pump: Balzers DUO030A, 26.5 cfm | Evaporative systems: Filament transformer | Manual shutter with motorized horizontal substrate rotation | Digital cold cathode: Balzers PKG100 | Pirani gauge.
  • PFEIFFER / BALZERS : Classic 580

    Details
    ID#:
    9133363
    Category:
    Solar Production Eq...
    Thin Film Coating System | Chamber : | Diameter : 740mm | High : 915mm | Volume : 400 litres | | (2) Windows | Heating with infrared lamp | Glow discharge unit | (2) resistance evaporators | Electron beam with high tension alimentation Telemark 10kW | (6) evaporation boat Télémark model 271 | Thickness control by inficon measure | | Pumps : (2) turbo TPH 2200 | (1) primary pump DUO035D | Automatic drive of all functions.
  • UNAXIS / BALZERS: BAK EVO 760

    Details
    ID#:
    183631
    Category:
    Evaporators
    Vintage:
    2001 
    Multiple Source Thermal Evaporator | Configured with 3 shutters and 8 water cooled power feed throughs | 3 Inficon XTC crystal deposition monitors each controlled via Khan computer | Substrate carrier for 8 in. dia. substrates | Khan process control with user friendly graphics | Fully integrated multi-tasking PC-based control system | CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down | 2001 vintage. |
  • BALZERS: BA 510

    Details
    ID#:
    186817
    Category:
    Evaporators
    Bell jar system | (3) Thermal Sources | Shutters | 510mm Diameter | Pump system | -Diffusion pump Balzers Diff 200 | -Balzers Buffle BFA 200 | -Freon compressor PW3K7 with R413A | -Pfeiffer rotary pump DUO 030A | -n°2 Balzers EVA 040P | -Balzers vent valve EVM016 | -Balzers high vacuum valve PVA 200PD with Throttle function | Instruments for vacuum controls | -Balzers TPG 070 with 3 TPR 010 | -Balzers IKW 010 with IKG 020 with set points for run process | -PC 101 for automatic pumping control | Process Systems | -Balzers BPU 100 automatic systems process control for n°4 sources and 36 layers. | -Quarz Monitor Balzers QM101 With head QSK 300 | -N° 2 thermal source working with automatic system BPU and thyristor Eurotherm | -Automatic Balzers shutter for both sources | -Automatic rotary system BD104 | Electrical System | -3P-N-GND 380V for 50hz | -EEO 101 safety stop | -ERE 101 connection box | -EPC 301 distribution power box | -Water cool valves and flows switches | -Electrical and water predisposition for E-Gun | Includes operation and maintenance manuals. |
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