BALZERS DIF 400 Products

  • BALZERS: DIF 250

    Details
    ID#:
    83528
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 250

    Details
    ID#:
    31327
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 500A

    Details
    ID#:
    75060
    Category:
    Pumps
    diffusion pump, ISO 500. 11,500 l/s. Unit weight: 396 lbs.
  • BALZERS: BFA 400 MF

    Details
    ID#:
    9048071
    Category:
    Spare Parts
    Combination baffle | P/N: PT B03 503.
  • BALZERS: DIF 160

    Details
    ID#:
    31326
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 500A

    Details
    ID#:
    9061848
    Category:
    Pumps
    Diffusion pump.
  • PFEIFFER / BALZERS: QMA 400

    Details
    ID#:
    136849
    Category:
    Pumps
    Faraday cup | | Specifications: | Mass analyzer | Ion source | Filter | Ion detector | Flange with all feedthroughs | | Requires RF generator and QMS 420 operating console.
  • UNAXIS / BALZERS: LLS 502

    Details
    ID#:
    112177
    Category:
    Sputtering Systems
    Wafer Size:
    4" 
    Sputtering systems, 4" | | Specifications: | | Main body: | Model: Balzers LLS 502, 3x400/230V 50/60Hz | (2) CT8F cryo pumps | (1) DU0030 Lotary pump | | Substrate holder: | 3 type of Balzers substrates can be used: | 4" dia X 0.5mmt | 4" dia X 1.2mmt | 4" dia X 2.0mmt | | Gas box: | For Sputter, 1 x MFC: Ar. 500 sccm | For Etching, 2 x MFC: Ar. 20/50 sccm | For Slow Vent, 1 x MFC: N2. 5000 sccm | | DC-PM cathode: | Model: (5) Balzers AK515 | Cathode Length : 5" x 15" | Stack sputter | | DC Cathode power: | Model: Advanced Energy MDC 5KX | Maximum Power : 5KW | | (4) Magnet systems: | (3) Balzers MB 515 For Cu. Cr. Ti. | (1) Balzers MC 515 For PamaAroi, Ni80/Fe20 | | Substrate Heating Heaters: | Balzers MCC Ni50/Fe50 | For Load Block chamber: | Quartz Ramp Heater | Heater Capacity : 2 KW | Maximum Temperature : 200 Degree | For Process chamber : | Quartz Ramp Heater | Heater Capacity : 4 KW | Maximum Temperature : 400 Degree | | Ion Beam Etching System For Load Lock chamber: | Model: Inotech Linia Ion gun | Length : 6.0 x 30.0cm | Acceleration Voltage : 0-1000 V | Beam Current : 300mA | Ar Gas flow : 10 sccm | Working distance : 28 / 29cm | Cooling Method | Power : MPS500IPBN | New Driver | | Chamber Cover: Balzers stainless steel | | Transformer trance: Yamamitu Denki | 1st : 3 layers 200V 3phases | 2nd : 3 layers 400/230V 5phases | Capacity : 40KVA | Length : about 700W x 700D x 780H | | Target material: | Length : 5" x 15" | Material : Ti, Cu, Cr, FeNi | | Chiller unit: Miura Zimusyo | | Maintenance hoist: Balzers | | DC Bias: Above 150V | | Poli code: PFC 400 | Power : 3 layers 200V 3Ph 16A | Capacity : 3.2 KVA | cooling Water : 3.8 lpm / 18 degree | (1) DC pulsed, 5KW | (1) RF, 3KW | | Currently de-installed and warehoused | Decommissioned in 2007 | Can be inspected | 1995-1996 vintage.
  • BALZERS: BAF 301D

    Details
    ID#:
    70883
    Category:
    Etchers / Ashers
    Freeze-etching system for TEM sample preparation, with 19" tall x 15" wide vacuum chamber with tapered rear wall. 18" deep at bottom & 13" deep at top, with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF and ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4, 8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided.
  • BALZERS: BA 510

    Details
    ID#:
    186817
    Category:
    Evaporators
    Bell jar system | (3) Thermal Sources | Shutters | 510mm Diameter | Pump system | -Diffusion pump Balzers Diff 200 | -Balzers Buffle BFA 200 | -Freon compressor PW3K7 with R413A | -Pfeiffer rotary pump DUO 030A | -n°2 Balzers EVA 040P | -Balzers vent valve EVM016 | -Balzers high vacuum valve PVA 200PD with Throttle function | Instruments for vacuum controls | -Balzers TPG 070 with 3 TPR 010 | -Balzers IKW 010 with IKG 020 with set points for run process | -PC 101 for automatic pumping control | Process Systems | -Balzers BPU 100 automatic systems process control for n°4 sources and 36 layers. | -Quarz Monitor Balzers QM101 With head QSK 300 | -N° 2 thermal source working with automatic system BPU and thyristor Eurotherm | -Automatic Balzers shutter for both sources | -Automatic rotary system BD104 | Electrical System | -3P-N-GND 380V for 50hz | -EEO 101 safety stop | -ERE 101 connection box | -EPC 301 distribution power box | -Water cool valves and flows switches | -Electrical and water predisposition for E-Gun | Includes operation and maintenance manuals. |
  • BALZERS: LLS 801

    Details
    ID#:
    9004740
    Category:
    Sputtering Systems
    Vintage:
    1987 
    Sputtering system | | Configuration: | Lock chamber | Gas inlet LC | Pfeiffer TPH 170 turbo pump, controller TCP 300 | Main chamber with (5) positions | Heater | (3) AK 517 Magnetron, magnet system “B” | Blanking flange | Meissnertrap | Gas inlet MFC | SSC 101 Balzers shutter control unit | TSC 101 Balzers transport control unit | Prevacuum oil pump DUO 030A Pfeiffer | Balzers vacuum measuring system | Cryopump Balzers RCP 250 with cold head APD DE 208 | Cryo compressor Balzers | Substrate holder without pallets | Original control DEC system with partial upgrade, emulator for data storage, screen and keyboard | Water distributor, original configuration | Capacitive gauge 0.1 mbar for process gas measuring with Maxigauge Pfeiffer vacuum readout unit | Step motor for rotary drive | MPS 120 Balzers magnetron power supply | ERE 201 with relay boards and LED indication | Documentation | 1987 vintage.
  • BALZERS: BA 510

    Details
    ID#:
    35733
    Category:
    Evaporators
    Vacuum evaporator | | Includes | Stainless water traced bell jar (20" x 25") | (2) Viewports on a 22" OD stainless steel baseplate with hydraulic hoist | (2) High current feedthroughs | Pumping system: DIF200 diffusion pump, 2000 l/s | Water cooled baffe: Balzers BFA200W | Electropneumatic valves | Vacuum system controller: Balzers PC101 | Direct drive mechanical roughing pump: Balzers DUO030A, 26.5 cfm | Evaporative systems: Filament transformer | Manual shutter with motorized horizontal substrate rotation | Digital cold cathode: Balzers PKG100 | Pirani gauge.
  • PFEIFFER / BALZERS: TPH 2200 SG

    Details
    ID#:
    191053
    Category:
    Pumps
    Turbo molecular pump | PFEIFFER / BALZERS TCP5000 controller.
  • BALZERS: BAK 760

    Details
    ID#:
    9071303
    Category:
    Evaporators
    E-beam evaporator | Chamber | 6-Head Crystal monitoring system | IC5 Deposition controller | Eurotherm 2704F Temperature controller | Glow discharge | (1) EGC38 EB-gun | (1) Thermal evaporator | Complete water circulation system (manifold) | Polycold PFC-PFC 672 HC | Profibus system | Water chiller (cold/warm water option), 2001 vintage | Pump system/stages: | First stage: Trivac D65B, Ruvac WA501 | Second stage-HV: Balzers Diffusion pump 500A, 3-stages jet system | Vacuum measurement gauge: MT1-3, MP, MI (piarni, ion gauges) | (2) Gas inlet valves: MFC3 and MFC4 | MKS 179B Digital mas flow controller.
  • BALZERS: BAK 600

    Details
    ID#:
    161695
    Category:
    Evaporators
    Batch coating system | Capable of handling ~(8) 6" wafers at once | Includes: | BALZERS HGG700 HV transformer | BSG 301 control unit for HGG 700 (0-400 mA) | RVE 016 gas inlet valve DN 10 KF (flange) | High voltage feedthrough | Vacuum switch | High voltage cable | Connection cable HGG J2 - BSG J3 (4m) | Connection cable HGG J3 - BSG J1 (4m) | Vacuum monitor (4m).
  • BALZERS: Lot of

    Details
    ID#:
    9055198
    Category:
    Spare Parts
    Spare parts. | | | QTY | PART NUMBER | MODEL | DESCRIPTION | (1) B 5123 203AA TB-BA-4/220-160/S DC MOTOR AMPLIFIER / CONTROL PCB | (1) BG 542 380-T TB-BA-4/220-160/S DC MOTOR AMPLIFIER / CONTROL PCB | (1) BG 542 380-T TB-BA-4/220-160/S DC MOTOR AMPLIFIER / CONTROL PCB | (1) B 5278 853 PH-E LSI 11/23 M8186 MICRPROCESSOR MODULE, DEC, PCB - PRO 420 / VAC 420 | (1) B 5278 865 FC MXV 22M MXV-DISC DRIVE CONTROL MODULE, MTI PCB - PRO 420 | (1) BG 512 780-T/F MM 420 MULTIFUNCTION MODULE, PCB - PRO 420 | (1) BG 512 800-T IA 420 ANALOGUE I/O MODULE, PCB - PRO 420 | (1) BG 440 500-BT RV 420 GAS CONTROL MODULE (2CH), PCB - PRO 420 | (1) BG 541 175-S PI 420 PIRANI MODULE, PCB - VAC 420 | (1) BG 545 470-T EE 420 EMISSION CONTROL MODULE, PCB - EEC 420 | (1) B 4787 149HA 2 OM 3 RELAY OUTPUT MODULE, MURRELECTRONIC, 16 WAY, DIN RAIL MOUNT - ST 700 / PRO 420 | (1) B 5181 830 1D EHV 215 - U5 AUXILLARY POWER SUPPLY, PCB, EHV 215 | (1) B 5181 8302B ECS 200 DEFLECTION POWER AMPLIFIER, PCB - ECS 200 | (1) BG 543 048-T HGG 700/2000 GLOW DISCHARGE MEASUREMENT BOARD, PCB - HGG 700/2000 | (1) BG 527 050U EXT CARD EXTENDER BOARD, PCB - BPU 100 | (5) B 4079 155 P ESQ 110 L RING GASKET, 14/24x7mm | (1) BG 545 110-T ESQ 212 POSITION BOARD, PCB - ESQ 212 EB GUN | (1) BB 166 761-T ESQ 212 EBGUN BODY, END PLATE, HIGH PURITY COPPER, ESQ 212 | (1) BK 203 525 ESQ 212 GEARED WHEEL - ESQ 212 | (2) B 4317 145 AF ESQ 212 WORM WHEEL B05100 1r0, 5x100mm | (2) B 4316 100 AF ESQ 212 WORM, ETG100, S 5H1R 1r-0.5 | (1) QSK 610 / 610A QSK QUARTZ MEASURING HEAD, BODY ONLY, INCOMPLETE | (2) BG 524 181 QSK 610 / 610A DISC - QSK 610 / A | (1) BG 524 142-X QSK 610 / 610A PICK UP SHOE, GOLD - QSK 610 / A | (5) BG 542 191 QSK 610 / 610A CONNECTION STRIP, GOLD - QSK 610 / A | (1) QSK 610 / 610A OUTER CONTACT STRIP, GOLD - QSK 610 / A | (2) BG 524 149 QSK 610 / 610A CAP LOCKING PIN, QSK 610 / A | (1) BG 4524 138 UA QSK 610 / 610A QUARTZ MAGAZINE, COMPLETE - QSK 610 / A | (1) BG 524 139 T QSK 610 / 610A QUARTZ COVER, COMPLETE - QSK 610 / A | (1) BG 543 848-T QSK 610A QSK CONTROL BOARD, PCB - QSK 610-A | (1) RBG 543 848-T QSK 610A QSK CONTROL BOARD, PCB - QSK 610-A (RTC SYSTEMS VERSION) | (1) B 4082 210 F BD-104 Felt Ring 16/28x6 - BD-104 ROTARY DRIVE | (1) B 4079658PF EHV 110 A TRIODE, BRIM SEAL, 100/130mm x 13mm - EHV 110A HV SUPPLY | (1) BG 202 762 EHV 110 A TRIODE SUPPORT RING - EHV 110A HV SUPPLY | (1) 3CW20000A7 EHV 110 A TRIODE , EIMAC, 3CW20000A7, WATER COOLED | (1) VIEWPORT ISO-F VIEWPORT, WELDING FILTER, SHUTTER, KIT - BALZERS BAK 760.
  • BALZERS: UMS 500

    Details
    ID#:
    144768
    Category:
    Evaporators
    Special Ultra High Vacuum System | With a pressure < 3x 10e-11mbar | (1) Balzers Electron Beam Power Supply EHV 110A | (2) Balzers Electron Gun Control EKS 110A | (1) Balzers RTC 110 Rate Controller | (2) Balzers ES300 E-Guns | (1) Balzers Ion Gauge Control IMG 070 | (1) Balzers Sublimation Control USS 110 | (1) Balzers UMS Control UMC 101 | (1) Pfeifer Turbo Pump Power Supply TCP 300 | (1) Balzers Heater Control Unit UAS 301 | (1) Advanced Energy ID 2500 Ion Beam Drive | (1) Ion Beam Source | (1) Balzers Quadrupole Mass Spectrometer QMG511 | (1) Varian TSP control Unit Model VT922-0052 | (1) Balzers Temperature Control Unit 0° to 400°C | | Water Distributor Rack | | Includes Documentation with drawing and schematics.
  • BALZERS: BAK 760 D

    Details
    ID#:
    9016971
    Category:
    Evaporators
    Coater | Vacuum pump UNO 100 | Roots pump WKP 500 | Diffusion pump DIF 500A | High vacuum valve PVA 500 | Baffle with cooling compressor BBA 500 | Meissner Cold trap with Polycold PFC 550ST | E-Gun with 1 x ESQ 110, EHV 110 and 1 x ESK 110 | Layer thickness controller QSK 310 (single quartz) | Rotary drive, with auto turn system and turn paddle or one carrier segment | (2) Resistant evaporating devices | Backside heater 9 KW | Incl. vacuum tubes and measuring devices | Controller BPU 420 G, PRO 420 and VAC 420, screen and keyboard.
  • BALZERS: BAK 640

    Details
    ID#:
    185716
    Category:
    Evaporators
    Evaporator | Booster pump frame: DUO 100 with WKP 250 | High vacuum pump: Diff 400 with baffle | Baffle cooling: with cooling device | Meissner trap: integrated, but no Polycold device | High vacuum valve: PVA 400 | Pre-vacuum and bypass valve: DN ISO 100 | Rotary drive: BD 104 with motor and vacuum rotary feed through | Cup holder: 2-part inclusive of 2 set segments with reversal holders for reversal system, or 2 set segments without insert ring | Electronic stream vaporizer: EV-M5 by Ferrotec with 4-cup interlock plate, capacity per position 8 cm3 | Thermal vaporizer: transformers are available, no electrodes | Electric drive available | Substrate heater: rear heating 6 kW | Layer thickness measurement: QSK 300 oscillating crystal measurement, single crystal | Machine control: fully automatic systems and process control BPU 420 E with monitor and keyboard | Monitor: TFT 17” monitor | Vapor protection sheets: 1 set | | (1) Ferotec 4 Pocket E-beam Gun | BPU 420 E controller.
  • UNAXIS / BALZERS: BAK EVO 760

    Details
    ID#:
    183631
    Category:
    Evaporators
    Multiple Source Thermal Evaporator | Configured with 3 shutters and 8 water cooled power feed throughs | 3 Inficon XTC crystal deposition monitors each controlled via Khan computer | Substrate carrier for 8 in. dia. substrates | Khan process control with user friendly graphics | Fully integrated multi-tasking PC-based control system | CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down | 2001 vintage. |
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