utilisé TEL / TOKYO ELECTRON ALPHA 303I à vendre

This TEL / TOKYO ELECTRON ALPHA 303I has been sold.

Check our Similar Products below, use our Search feature to find more products available for sale or contact us with any questions you might have.
ID#: 9099381 Fabricants: TEL / TOKYO ELECTRON Maquette: ALPHA 303I Catégorie: DIFFUSION FURNACES & ACCESSORIES Détails de l'équipement: Vertical diffusion furnace, 12"
Process: TEOS
(1) Heater element Model: Mid-Temp VMM-56-002 5zone/500-1000
Process Condition: LP
Maximum Operating Temperature: 1000°C
N2 Load Lock: Yes
Wafer Type: 300 SEMI STD-Notch
Qty. of Production Wafers: 117 slots Ladder
Boat Operation: (2) Boat Type / (2) Boat Operation
Software Version: 2.06

(1) Loading Area Light: White (LED)
Force Air Cooling system: None
Side Maintenance: None
(1) O2 Density control: NGK SH-304 STANDARD
(1) N2 Boat shower wafer cooling: installed
(1) Furnace Temperature Controller: M560A

Wafer/Carrier Handling:
Carrier Type: FOUP (25) slots (STD)
Carrier Stage Capacity: 16
(1) WTU Type: 1+4 Edge Grip
WTU alignment: None
WTU Teaching method: None

Gas Distribution:
IGS Maker / Type: AREA
IGS MFC Maker / Type: AREA (Gas Panel)
IGS Press Transducer Maker / Type: NAGANO

Vacuum Gage - 2 torr: None
(1) Vacuum Gage - 10 torr: MYKROLIS CMLH-31-150S06
Vacuum Gage - 100 torr- None
(2) Vacuum Gage - 1000 torr: MYKROLIS CMLH-11-150S06
(1) Main Valve: MKS-99C1274

(1) Pump Maker/Model: EDWARDS IH-1800
Low vacuum valve: None
(1) Trap: Disk Trap
(1) Vacuum Pressure Controller: N2-ballast

(2) Process Tube (LP): Outer: ID448xH1360, Inner: Straight H1340
(2) Outer/Inner Tube Material (LP): Quartz
Inner Tube Type (AP): None
(1) Inner T/C: Outer Tube interior wall type
(2) Boat Material/Type: Quartz 117 slots Ladder (8mm pitch)
(1) Boat Rotation: installed
(1) Pedestal Materiel/Type: Quartz Sand blast OD300 H350 1fins
(1) Auto Shutter: installed

Power Distribution:
Voltage, 3 Phase: 208VAC
Voltage, Single Phase: 120VAC
Frequency: 60Hz

User Interface:
(2) Operation Panel: Front/rear Gas Box and Operation Panel Installed
(2) Indicator Type: Superset
Operation software type: Linux

(4) Gas Leak Detector Material/Type: Riken TEOS/CLF3
Dry pumps: not included.
[+] Lire la suite [-] Fermer

Merci d'avoir partagé vos informations. Nous vous contacterons brièvement concernant votre équipement.


Envoi de message ...

Entrez vos coordonnées et un membre de l'équipe commerciale de CAE vous contactera pour discuter de l'équipement.

* Champs requis