Utilisé EDWARDS 306 #89773 à vendre
This EDWARDS 306 has been sold.
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ID#: 89773
Manual sputtering system
10" from spinning substrate holder on top to targets on bottom
Stainless steel chamber, 12" diameter x 10.5" tall
Includes viewport
Diffusion pump
Dual sputtering guns (~3.5" diameter)
Glow discharge for soft etch
Micrometer adjusted gas input
Pirani gauge
ADVANCED ENERGY MDX digital DC sputtering supply
Manual valving
Options available:
Ion gauge to measure vacuum level at 10-7 (installed)
Mass flow control for 2 gases
Upgrade to cryopump.
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Fabricants:
EDWARDSMaquette:
306Catégorie:
SPUTTERING SYSTEMSDétails de l'équipement:
