Utilisé ULVAC MLX-3000N #9156853 à vendre

ID#: 9156853

Fabricants:

ULVAC

Maquette:

MLX-3000N

Détails de l'équipement:

Sputtering system
Multi chamber type (C to C)
Substrate size, 6" combine

Cassette-chamber
Sputter chamber
Etching chamber

Vacuum pumps:
Turbo molecular pump
Dry pump

Vacuum pumps:
Cryo pump
Cryo trap
Dry pump

Sputter source: Cathode, 12"
DC Power source
Process gas: Ar.
[+] Lire la suite [-] Fermer
loading