VEECO / IONTECH SPECTOR

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Détails de l'équipement Spécifications techniques telles que taille de la plaquette, dimensions, processus, nombre de chambres, etc. VEECO / IONTECH Spector Convertible Optical Deposition system with SOURCERER Ion Beam System Manager with OMS Specifications: Pumping System: - CTI-400 "On board" Cryo pump - Mechanical Pump: Leybold D65BCS, Corrosive service - Ion Tech ITAS Auto Valve Sequencer including Granville Phillips Ion Gauge Controller, Auto Valve and Ion Source Interlocks - Molecular Sieve Trap - Auto Regeneration - Hot/Cold Water Switching Circuit - Soft Rough and Vent Chamber - Vertical split bell Jar, 42" dia x 36" high - Water cooled - (2) sets of Stainless Steel Liners - Rear View Port - Swing Open Front Door - Spare Ports (3) Target Holders - 3 each 14" diameter targets - Water cooled - Supplied Targets and bonding (1 Ta, 2 SiO2, Pure Tech) Quartz Heaters - 250°C capability High Speed Fixture - High speed (0-2000 RPM) Single Rotation - 12" Diameter Substrate - Stainless Steel Shields - Substrate Shutter - Shadow Masks for each material (up to 3 materials) SOURCERER 32 ion Beam System Manager Computer -Industrial Grade Pentium Computer Monitor - VGA Color Monitor - Touch screen for data entry RIB System Controller - Microprocessor-based - Provides communication between the computer and the system equipment - 24 Relay Interfaces - 16 Optically Isolated RS-232 Interfaces Operating Up to 19.2K Baud RF Ion Beam Assist Source Model 12RF-INT 12cm RF Ion Beam Source, Internal Mount -Dished Molybdenum Grids 12cm RF Installation Kit (2) RF Neutralizer Model 700-RFN-300 (2) RF Ion Source Power Supplies Model RF-2001 RF Ion Source Power Supply - 500 W RF Power Supply - 0-1500eV, 500mA - 13.56 MHz - RF Neutralizer Supplies - Automatic Matching Network and Controller (2) Gas Flow Controllers Model GF-1000-U Gas Flow Controller Quartz Crystal Monitor - Inficon IC-5 - Three Sensors - Micro Balance Module Hardware and Software for Optical Monitoring System - In-Situ Optical Monitoring - Tunable Laser and Detector (HP 81680A and HP 81525A) - 1460nm -1560nm Monitoring - Motion controller (auto alignment of laser and detector) - Computer/Monitor and Interface - Miscellaneous Interconnections - Quarter Wave Monitoring Capability (6) Spare Target Backing Plates No RGA 2001 vintage. Plus de détails se traduira par des références plus précises. * Champs requis Informations de contact