Utilisé HITACHI S-9220 #9309511 à vendre

ID#: 9309511

Fabricants:

HITACHI

Maquette:

S-9220

Détails de l'équipement:

Scanning Electron Microscope (SEM)
(3) IP Magnets
battery
AV operation pane!
MHV beard
(2) Turbo controllers
IP backup unit
(2) Transformers
(2) Stage drivers
Heater assembly
Solenoid valve unit
HV Controller
EVAC Controller
Capacitor power supply
Valve assembly
Camera detector
Camera assembly
Lamp unit
Linear scale preamplifier X. Y
OM Driver
Flowmeter
POST
CNCOR D1 Beard
Axis Driver Motor: X, Y
Linear scale head
Stage O-ring
Alignment unit (Arm)
Sample stage
AV 5.6.7 Valve
Pirani gauge
(2) Penning gauges
SE headlamp
POST HV
Butterfly valve
Booster power supply
Leak valve
pressure sensor
Lamp CN board
VACS Board
L-axis motor
Standby robot controller
Stage HP sensor
Rotating robot
AY3
AV2
Standby robot
Power supply unit
XP5D AMP Board
IMP Damper
Diagonal sensor
AV3 O-ring group
IP Vacuum piping
LC lid
L-Axis ball screw
EMO SW
LC Part sensor
LC Hermetic Seal
ST holder
Roller holder
Chuck Unchuck
Wafer holder
Hotmaru (Fragment)
SUS arm
(2) Turbo pumps
AV2 roller
Movable pin guide
Trap board
Objective lens
Electron gun
Change coil
Movable aperture unit
Cam floor
Scale (Fragment)
Cylinder
Operation unit foot image system board set
Stage controller

Boards:
Lens PS
XDEF PS
KSENS-CN
BEAM-CN
COL-CN
Alarm IF2
EV CX.
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