Occasion JEOL JBX-6000 FS/E #293759195 à vendre en France
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ID: 293759195
Taille de la plaquette: 8"
Style Vintage: 2011
E-Beam lithography system, 8"
E-Beam source: ZrO/W TFE
Spot beam shape
Vector scanning type
Stage movement: Step and repeat
Minimum beam diameter: 5 nm
Laser control resolution: 0.62 nm
S2P NV Dist
WU061EB Chiller
HT RFG Tack
Main console:
(4) Ion pumps
Edwards STP-1000 Turbo molecular pumps
Workpiece exchange chamber
Agilent 5517 Laser
Aperture assy
Operation console:
Vacuum control panel: (10) Boards
EB I/O Controller
Detector control unit: (19) Boards
System console:
HP Alpha station DS15 Workstation
Hard Disk Drive (HDD)
Monitor
Keyboard
Bake controller
Power box (TA, TB, TC, TD): 120 V
Console connect
Power supply rack:
DEF AMP Power supply
DC Power supply
AC Filter power supply
5V Power switch box
Vacuum rack:
(2) PEG
ALV / PEG Controller
(20) SIP Power supply
Vacuum DC Power supply
Turbo molecular pump controller
STP-1000 Controller
VARIAN IP5 Controller
AC Filter vacuum
Control rack A (EOS):
Auto loader controller
5V 10A Power supply
EOS Controller
Lens controller
Detector power supply
Control rack B (DEF)
Power supply: 5 V 30 A/60 A
AMP Deflection
HR-STC
Scanner
AC Dist. Controller A
Parts included:
Signal cable
Power cable
Image capture controller
Data cable
STG Cover
Cover set
Valve
Tube and lamp
Cable set
Power supply: AC 50/25 kV
2011 vintage.
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