Occasion AVACO Blank mask sputter for 1600 x 1440 mask #9395194 à vendre en France

(4) SHIMADZU TMP-2304LM Particle between transfer: 2 µm ≤50 d Tact time: Within 90 minutes Vacuum chamber: Load lock / Unload chamber, ≤ 5 x 10^-6 Torr (2) Transfer chambers, ≤ 2 x 10^-6 Torr Process chamber, ≤ 2 x 10^-6 Torr Leak rate, 5 x 10^-9 Torr L/sec Conveying system: AC Servo drive Upper magnet guide + Lower roller drive vertical transfer and film formation Sputter system: (2) DC / Pulsed DC Power supplies for Cr Deposition (2) Planar type cathodes Process pressure: 0.1 Pa - 0.7 Pa Reflectance: ≤ ±4% Film forming method: Mobile membrane Substrate transfer type: Vertical transfer, Inter-back type Thickness uniformity: On glass: ≤ ±4% Glass to glass: ≤ ±5% Lot to lot: ≤ ±5% Vacuum exhaust system: (2) Dry pumps (2) Cryo pumps (6) Turbo molecular pumps Vacuum piping Utility system: PCW, 0.5 MPa for wall cooling CDA, 0.7 MPa for pneumatic operation, 1" N2, 0.5 MPa for vents General exhaust Process gas Power system: 3 Phase, 60 Hz, 208 V ±5% Substrate: Board size: 1600 mm x 1440 mm, 5-10t Substrate: Soda-Lime, Quartz Loader zone: Base manual transport / Handling by MGV Carrier loading: Roller drive (Vertical) 2017 vintage.