Occasion LAM RESEARCH Lot of spare parts #293637886 à vendre en France
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ID: 293637886
Part number / Description
V7668A-131000 605-109114-001 / Single BD Computer
810-099175-013 / VIOP phase III
810-495659-511 / PCB assy, power supply ESC Bicep
571-033051-003 / 16 Line IGS Gas box
853-064887-061 / RF Matcher
810-107813-206 / ESC Power supply board
810-802901-300 / PM Board
853-181926-001 / Smart motor
839-248897-431 / Shower head
853-210665-002 / Ceramic heater pedestal
810-028298 / OT Module
853-049542-173 / Node mode
853-064887-011 / RF source unit
853-002499-200 / DC prove
810-064624-401 / ESC filter
810-802969-002 / Heater filter
810-048219-019 / Pulse SMPL
810-802902-207 / Mother BD node
810-107813-206 / ESC power supply board
810-107813-117 / ESC power supply
855-243028-005 / Comet match
810-064624-521 / ESC power supply
810-107813-117 / ESC power supply
810-107813R105 / ESC power supply
810-495659-511 / ESC power supply
810-495659-308 / ESC power supply
810-107813-206 / ESC power supply
790-073306-109 / Chamber mux board
839-800332-19 / ESC housing
853-002499-200 / DC prove
810-802969-002 / Heater filter
853-245622-002 / Optic temperature
666-068437-003 / Fluoroptic contact
666-800702-007 / part
790-073306-109 / Metal bellows prime mover
790-073306-009 / Metal bellows prime mover
810-107813-306 / ESC power supply
810-064624-401 / ESC power supply
810-064624-41 / ESC power supply
853-064887-011 / RF source unit
853-064887-010 / RF source unit
685-064724-002 / CCD spectrometer
685-064724-001 / CCD spectrometer
810-064624-521 / Bicep board
685-068190-004 / Galil motion control
685-068191-004 / Motion digiflex digital servo
- / Photon control fiber optic temperature sensor
605-707109-001 / Network interface
810-064624-401 / ESC filter bicep
810-107813-206 / ESC power supply board
810-225420-002 / Lonworks
810-800256-207 / Control type3
810-802902-208 / Node2 mother board
716-037794-260 / Insulator ring
715-108082-017 / ESC housing
810-107813-206 / Power supply HVBP board
810-107813-117 / Power supply HVBP board
810-006490-006 / DC probe
810-064624-511 / Bicep board
810-064624-521 / Bicep board
853-245622-002 / Temperature converter
SM2315D-BRK / Novellus altus airlock pin lift
810-107813-117 / Power supply HVBP board
810-107813R206 / Power supply HVBP board
796-098943-002 / Compact vacumm valve
790-022847-003 Metal bellows division prime
853-245622-005 / Optic temperature converter
- / Phoenix contact
- / Photon control fiber optic temperature sensor
666-045257R001 FGA-0172A / Photon control fiber optic temperature sensor
666-045257-006 FGA-0172K / Photon control fiber optic temperature sensor
853-036804-004 / Prime MVRS
853-002499-200 / Dc prove
810-801130-005 / PCB assy
810-802969-002 / Heater filter
810-048219-019 / Pulse SMPL and hold
810-802902-207 / Mother BD node
810-107813-306 / ESC power supply
839-800332-019 / Research ESC housing
790-073306-109 / Metal bellows prime mover
810-107813-117 / ESC power supply board
853-245622-005 / Optic temperature converter
853-002499-200 / DC prove
- / Heater watlow
853-014850-002 / TC sensor
853-004689-005 / TC sensor
678-016993-001 / Housing heater
666-800702-007 / Housing heater
810-107813-206 / ESC power supply
810-064624-401 / Filter bicep II
810-107813-206 / ESC power supply
790-022847-003 / Metal bellows division prime mover
853-064887-011 / RF source unit
- / Phoenix contact
722-800722-008 / Solenoid valve
853-245622-005 / Optic temperature converter
839-800332-019 / ESC housing
715-065729-001 / Silver plated
715-800326-115 / Low electrod housing
716-084752-012 / Low electrod housing ceramic
810-801130-005 / Board
810-802969-002 / Board
810-048219-01-019 / Board
810-802902-207 / Board
810-107813-306 / Board
839-800332-019 / Holder
790-073306-109 / Mover
715-800326-115 / Electrod
716-084752 / Housing ceramic
810-107813-117 / Board
853-245622-005 / Converter
853-002499-200 / DC prove
- / Heater
853-014850-002 / Sensor
853-004689-005 / Sensor
678-016993-001 / Heater
666-800702-007 / Heater
810-107813-206 / Board
810-064624-401 / Board
810-107813-206 / Board
790-022847-003 / Metal bellows
853-064887-011 / Unit
- / MCR
722-800722-008 / Valve
853-245622-005 / Temperature converter
839-800332-019 / Housing
715-065729-001 / Plated part
839-046079-021 / Plated part
853-004605-005 / Supply
853-002499-200 / DC prove
853-067076-012 / Shaft
810-802969-002 / Board
810-048219-019 / Board
853-007859-243 / Locker door
713-004567-001 / Etch
715-065729-001A / RF
853-064887-011 / Unit
810-048219-019 / Board
810-064624-41 / Board
810-107813-206 / Board
810-801130-005 / Board
810-802902-207 / Board
810-802969-002 / Board
790-022847-003 / Metal bellows
839-004572-014 / Weldment
839-046079-021 / Handle
853-067076-012 / RF parts
853-126656-001 / Parts
666-045256-006 / Sensor
- / Sensor
795-066541-001 / Cable
795-066541-002 / Cable
795-066541-003 / Cable
795-066541-004 / Cable
853-002499-200 / DC prove
853-036804-004 / Sensor
714-068736-009 / Sensor
839-800332-019 / Housing assy
853-025872-115 / Module
666-068437-001 / Sensor
795-117113-002 / Sensor
839-004572-014 / Gas feed line
715-038815-101 / Cylinder assy
833-004563-007 / Sensor
795-066541-001 / Cable
795-066541-002 / Cable
795-066541-003 / Cable
795-066541-004/ Cable
795-066541-005 / Cable
810-064624-521 / Board
771-001032-014 / Switch
810-107813-117, 810-064624-521 / Board
715-136932-002 / Strap
853-002499-011 / Voltage detecter
715-120549-031, 715-120549-037 / Parts
810-800256-207 Board
765-430126-007 / Bellows
666-045257-103 / Converter
666-045257-103 / Converter
810-028295-172 / Board
810-072687-122 / Board
715-065729-001 / Silver plated part
839-046079-021 / Handle
660-052198-002, 810-115965-003 / Power supply
810-800082-009 / Board
810-107813-117 / Board
853-043759-004 / Match
832-038915-001 / Auto tuner
795-117113-002 / Sensor cable
795-066541-005 / Sensor cable
795-066541-004 / Sensor cable
795-066541-003 / Sensor cable
795-066541-002 / Sensor cable
795-066541-001 / Sensor cable
839-046079-024 / RF shaft
853-002499-011 / DC prove
853-036804-004 / Sensor
790-073306-109 / Mover
790-022847-003 / Mover
666-045257-103 / Converter
715-136932-002 / RF shaft
715-136932-005 / RF swaft
765-430126-007 / Lift pin
853-111437-005 / Resistor
795-117113-002 / Sensor
715-038815-009 / Protector
715-038815-101 / Protector
810-064624-521 / Filter
810-800081-018 / Board
605-048878-001 / Board
810-099175-013 / Board
810-802902-019 / Board
810-800256-207 / Board
810-107813-117 / Board
810-006490-006 / Board
810-495659-308 / Board
605-048878-001 / Board
- / PC
02-293069-00 / PC
02-273469-00 / System
02-272805-00 / System
02-271697-00 / System
02-266872-00 / System
02-266870-00 / System
02-266868-00 / System
02-275643-00 / System
02-310728-00 / System
839-116628-006 / Gas box
853-208359-001 / Amplifier
685-089283-004 / Power detecter
839-065045-003 / Bellows
770-068220-003 / Compact cylindre pneumatique
765-430126-007 / Lift pin
810-802902-006 / Board
810-801130-005 / Board
810-800256-005 / Board
810-495659-511 / Board
810-064625-401 / Power supply board
810-064624-511 / Power supply
713-000863-103 / Cooling water
790-049307-007 / Water line
810-073479-015 / Gas box
810-802902-126 / Board
810-802902-006 / Board
810-802901-305 / Board
810-800082-201 / Board
810-800082-029 / Board
810-800031-300 / Board
810-800081-015 / Board
810-495659-511 / Board
810-099175-013 / Board
810-046015-009 / Board
605-109114-002 / Board
605-064676-006 / Board
839-102001-069C / Chuck
853-031197-807 / Gas feed line
605-064676-007 / Board
810-102361-222 / Board
676-033976-002 / Motor
853-007859-243 / Lock door assy
853-064940-004 / Board
778-900046-343 / Board
853-018225-201 / Probe
790-022848-114 / Mover
790-022848-014 / Mover
- / Contact MCR
666-045257-103 / Temperature converter
666-045257-006 / Sensor
853-002499-008 / Prove
810-801130-005 / Board
765-430126-007 / Lift pin
715-038815-101 / Cylinder
715-042350-003 / Protector
839-800332-016 / Etch
715-042721-866 / System hi flow
853-183255-001 / Computer
853-189925-021 / Computer
685-151515-001 / Computer
685-151509-001 / System
2891673 / Switch
785-179350-002 / Controller
685-008189-102 / Controller
1002685-20-28-0024 / Sensor
853-312548-002 / Cylinder
853-295609-003 / Sensor
853-257153-232 / Gas line
810-146798-001 / Holder
810-064624-521 / Board
795-117113-002 / Cable
722-264966-008 / Valve
765-137010-113 / Lift bellows
765-430126-006 / Lift pin
715-066836-003 / Sensor
715-066835-003 / Cylinder
715-038815-101 / Cylinder
678-031432-004 / Ring
810-495659-307 / Board
571-065780-68932 / Gas box
853-002499-200 / Detecter
795-066541-005 / Cable
795-066541-004 / Cable
795-066541-003 / Cable
795-066541-002 / Cable
795-066541-001 / Cable
853-036804-004 / Sensor
810-225420-002 / Board
790-022847-003 / Mover
772-800722-008 / Valve
839-101870-002 / Board
853-089062-052 / Filter
796-010678-001 / Airlock
839-430126-005 / Bellows
678-087532-001 / Band
678-064943-034 / sensor
571-065780-68932 / Gas box
685-069171-200 / Spectrometer
790-257830-042 / Valve
790-257830-042 / Generator
839-800332-019 / Housing ESC
795-066541-004 / Cable
795-066541-003 / Cable
795-066541-002 / Sensor
795-066541-001 / Sensor
772-800722-008 / Sensor
853-067076-012 / RF swaft
853-064887-011 / RF source
810-801130-005 / Board
810-802902-207 / Board
810-048219-019 / Board
666-045257-003 / Sensor
853-077069-012 / Sensor
853-002499-200 / Prove
853-036804-004 / Sensor
790-022848-014 / Bellows
853-103970-003 / Sensor
810-800031-300 / Board
669-185427-003 / RF pin
666-045257-107 / Sensor
666-045257-103 / Sensor
765-430126-006 / Lift pin
685-068190-004 / Controller
666-045257-103 / Converter
715-038815-101 / Cylinder
795-117113-002 / Sensor
685-068191-004 / Controls
853-111437-005 / Resistor
853-257153-232 / System
810-064624-521 / Board
810-033620-008 / Board
810-800256-207 / Board
810-802902-038 / Board
666-068437-001 / Sensor cable
853-018225-201 / Probe
715-038815-101 / Cylinder
810-802902-034 / Board
810-072687-111 / Board
810-802902-022 / Board
853-203016-172 / Board
810-800256-207 / Board
810-006490-006 / Board
810-064624-400 / Board
810-64624-521 / Board
772-801282-011 / Manfold
771-001032-014 / Switch
790-041628-010 / Generator
715-027741-004 / Port
795-117113-002 / Sensor cable
684-084547-002 / Sensor cable
684-084547-003 / Cable
795-236999-001 / Cable
853-111437-005 / Resistor
685-042168-004 / Server
765-430126-005 / Bellows
765-430126-007 / Lift pin
715-038815-009 / Cylinder
722-082235-003 / Regulator
772-082235-002 / Regulator
772-082235-001 / Regulator
772-016855-002 / system
666-045257-103 / Sensor
666-045257-103 / Converter
715-042350-003 / Cylinder
715-042350-151 / Cylinder
853-036804-004 / Sensor
853-014772-005 / Cable
765-430126-005 / Pin bellows
765430126-007 / LIft pin
795-236999-001 / Sensor
795-117113-002 / Sensor
715-038815-009 / Cylinder
715-038815-101 / Cylinder
853-111437-005 / Resistor
810-800256-207 / Board
7671-421000 / Board
810-099175-013 / Board
810-064624-521 / Board
810-064624-521 / Board
810-107813-117 / Board
810-006490-006 / Board
810-495659-308 / Board
795-066541-004 / Cable
795-066541-003 / Cable
795-066541-002 / Cable
795-066541-001 / Cable
790-022847-003 / Mover
853-036804-004 / Sensor
810-111863-004 / Board
810-802969-002 / Fillter
853-089062-052 / Filter
790-073306-109 / Mover
790-073306-109 / Mover
795-066541-005 / Cable
666-068437-003 / Fluroptic
839-019090-374 / Chuck
795-066541-001 / Cable
810-064624-521 / Power supply
810-064624-511 / Board
810-064625-400 / Board
853-018225-201 / Probe
666-068437-001 / Sensor
795-117113-002 / Sensor
765-430126-005 / Lift pin
765-430126-007 / Lift pin
715-064135-002 / Holder
685-042168-002 / Connector
685-089283-004 / Circuits power supply
685-068191-004 / Drive
853-111437-001 / Resistor
810-146798-001 / Resistor
715-088848-215B / Frequency
715-038815-101 / Cylinder
715-038815-009 / Cylinder
715-038815-020 / Cylinder
810-800081-022 / Etch
810-028295-172 / Board
810-802902-022 / Board
810-802902-034 / Board
810-802902-207 / Board
810-800082-201 / Board
810-800256-207 / Board
685-069171-002 / Spectrometer
685-064724-002 / Spectrometer
810-006490-304 / Board
853-002499-008 / Detecter
685-069171-002 / Spectrometer
833-810454-012 / Sensor
810-107813 / Board
810-064624 / Board
810-107813-117 / Board
853-111437-005 / Power filter
765-137010-105 / Cylinder
722-082235-002 / Regulator
772-082235-001 / Regulator
765-430126-007 / Lift pin
685-068191-004 / Digital servo drive
685-068190-004 / Control
666-045257-103 / Sensor
715-038815-101B / Cylinder
810-102361-222 / Board
853-021132-711 / Gas box
810-073479-002 / Board
571-065780-702 / Gas box
810-800256-207 / Board
790-073306-109 / Mover
853-002499-200 / Detecter
810-800256-207 / Board
810-064624-400 / Board
810-800256-015 / Node
772-801282-011 / System
V12F-253 / Sensor
V12F-249 / Sensor
765-430126-007 / Bellows
790-073306-009 / Mover
790-073306-109 / Mover
839-057594-151 / system
853-089062-014 / DC probe
810-102361-222 / Board
666-045257-006 / Sensor
666-045257-103 / Sensor
666-045257-003 / Sensor
685-068191-004 / Digital servo
810-225420-002 / Board
810-801130-005 / Board
810-802969-002 / Board
810-495659-511 / Board
853-002499-011 / Prove
853-002499-200 / Prove
715-038815-101 D / Cylinder
715-038815-101 D / Stage II cylinder
605-048878-001 / GE Fanus vmbus
790-073306-009 / Metal bellows prime mover
790-073306-109 / Metal bellows prime mover
810-800256-207 / Node board
810-048219-019 / Plus sample and hold
810-802969-002 / Heater filter board
810-801130-005 / PCB Assy TC RTD Circuit board for 2300
853-064887-001 / RF Source unit
1020-OUM02286 / 772-082235-001/ Regulator assy
V8F-148 / Sensors row switch
- / Power supply
FTC-DIN-SSMA-2512-EP2B, 666-045257-003 / -
839-802923-002-C / HLDR, QTZ WIN, FCTR, SCRN
715-038815-101 / 2 Stage cylinder
853-002499-200 / Voltage detector
V12F-249 / Sensors row switch, 10 W Max, 0.5 A Max, 50 VDC Max
853-036804-004 / MVRS, BSR OPT Sensor
770-068220-003 / NCQ8A075-XC11-DAM00228 / Compact cylindre pneumatique
810-107813-206 / 810-064624-401 / ESC Power supply, Filter bicep II
810-107813-206 / 810-064624-401 / ESC Power supply, Filter bicep II
810-800256-005 / Node board type 3
810-800256-015 / PCBA, node type 3, phase II
810-046015-010 / VIOP III PCB
IR1020-DUN00211 / 772-082235-003 / Bank regulator
1020-OUM02286 / 772-082235-001 / Stage II Regulator IR
1020-DUM03550, 772-082235-002 / Regulator IR
D12SP6FP / Photoelectric sensor, 10-30 VDC, 150 mA
772-801282-008 SY100-DUI00226 / Manifold terminal valve
772-016855-002, SS5YJ3-DUI00249 / Manifold terminal valve
666-045257-103 / Fiber optic temperature converter FTC-DIN-ST-GT--DE ES
GR-312F / Mass row controller HE 50 SCCM
GR-312F / Mass row controller HE 100 SCCM
685-068190-004 / Galil motion control
600 685-042168-004 / -
DPRALTE-020B080-LR3 685-068191-004 / AMC Digiflex digital servo drive
571-033051-002 / 16UNE IGS Gas box
45700406 / Manifold valve
810-800081-018, 710-800082-201 / P2 MB VME Box PCB
810-802902-019 / PCB, node 2 MB
810-802902-034 / Motherboard, node 2
715-038815-101 / FLEX GX 2 Stage cylinder
715-038815-009 / FLEX DS 2 Stage cylinder
839-038814-001-O / RF Bar pin
715-136932-002 / RF Shaft
765-430126-007 / Bellows assy
571-033051-002,571-065780-702,703,704,705 / 16-Line IGS Gas box
DC-PROBE810-495659R308, 810-107813-117 / Bicep ESC Power supply II
810-275260-001, 810-064624-521 / ESC Filter Bicep, II ESC Power supply
853-040482-661 / Flex GX Match
6LW-DPC111P-CM-34103 / Manifold valve
839-057594-151 / Flex valve assy
796-098943-002 / Vacumm valve
839-801682-005, 839-802923-002-C / HLDR,QTZ WIN, FLTR, SCRN View port
6LW-MSM-ALD6T35356P-AS / Manifold and Ald6 valve
810-800256-005 / Node board, type 3
605-048878-001, VME-7671-421000 / GE FANUC
853-017632-001 / Pressure switch
810-099175-013 / VIOP, Phase III Assy REV B
810-046015-009 / VIOP, phase III Assy REV B
810-069751-20 / PCB, node board, type 27
605-707109-012 / ENGENUITY VME-LTNI-S5 6004-0100-12 REV C Network interface
605-707109-012 / ENGENUITY VME-LTWI-S4 Network interface
605-048878-001, VME-7671-421000 / GE FANUC VME
MCR-PS-240C/2x240C / Power supply
FGA-0172F 666-045257-003 / Control fiber optic temperature sensor
605-048878-001, VME-7671-421000 / GE FANUC VME
678-031432-004 / TCR Ring assy
810-046015-009 / VIOP, phase III Assy REV E
GIGABIT ETHERNET GE V7668A 605-064676-008
678-087531-001 / Heat and sensor THERM-X, TCR Ring
810-107813-206 / ESC Power supply board
853-089062-052 / DC BIAS Filter
871-033051-002 / IGS Gas box
853-182011,853-010182,832-078421,853-043759,832-038915,853-043759,853-243028,853-064884,853-0101 82,27-374427 / RF Match
853-031436-421,715-03576-323 / TCP COIL TCCT Assy
N324 15-302588-00 / Membrane cationic extreme cell
716-012639-040 / Gas injector
715-042721-885 / UNER, SYM, High flow, 2300 SRC
834-036619-011 / RF Cable
715-030576-323 / TCP COIL Assy, TCCT, Ultem guide
715-042721-810 / UNER, SYM, High flow, 2300 \ REV C
001-9010-02.003-9010-03 / Vacuum cassette elevator up-seal type
810-802902-207 / Motherboard node 2
810-802969-002 / Heater filter
839-800332-019 / ESC Housing assy
853-002499-200 / DC Prove
853-036804-004 / Assy, OPT Sensor, Prime MVRS / BSR
853-064887-011 / RF Source unit, 13.56 MHz
853-067076-012 / RF Parts
666-045257-006 / Control fiber optic temperature sensor FGA-0172A, FTC-OIN-SSMA-2512-EP2B
666-068437-003 / Temperature probe
715-800326-115 / Chamber housing assy
715-800326-115 / Chamber housing assy
772-800722-008, SS5YJ3-DUK02255 / Solenoid valve
790-073306-109 / Metal bellows prime mover
795-066541-001, 795-066641-004, 795-066541-001, 795-066541-003 / ESC temperature optic cable
810-048219-019 / Stepper driver interface
810-107813-206 / ESC Power supply
810-801130-005 / PCB Assy TC and RTD
6LW-OPB111P-CM-42363 / Diaphragm valve
853-064887-402 / RF Source, 13.56 MHz
853-049542-174 810-028295-174 / Node board, 24 Channels, temperature controller
778-900046-343 / WATLOWAMAFAZE LON COM Card
853-017653-001 / 10 Torr manometro
715-088515-104 / Ring, GRD, Spring loaded, CONT STRAP
FE-HDSIOC 0/1 WTS 02-334968-00 / -
853-201504-001 / SABRE 3D Plate
715-045710-828 / Chamber
839-102001-069C / ESC Chuck, DZ, BTM-MTD
810-107813-206 / ESC Power supply PCB Board
810-064624-401/ ESC Power supply PCB Board
-/ ESC Temperature sensor
853-043759-218 / TCP Match
810-800256-005 / Node board, type 3
772-082235-001 / 2 Stage regulator
853-040482-301 / RF Match
771-001032-014, 98008SA10F3P2 / Flow switch
- / Hastings vacuum sensor
853-126656-001 / -
766-083423-001, 790-257830-042 / RF Generator cooung une burkert check valve assy
685-008189-102 / Control device master
715-03576-323 / Assy, TCP Coil, TCCT
713-026330-004 / CLP, Bottom, WDO MTG, TOP Chamber
715-042721-810 / UNER, SYM, HI FLOW, 2300
839-031197-110 / WLDMT, INTFC, Chamber separate, NOZ
810-013872-106 / Node board, type 26
715-027638-814,715-030576-303-B / Chamber top PC, 2300MTL/PLY
810-495659-006 / Bicep ESC Power supply
810-010473-401 / PCB RF Interface
685-008189-102 / Control devicemaster LT16-K
853-182680-105 / Vector spindle controller
810-107813-117 / ESC Power supply
714-045743-809 / UNER, FIXED OUTR, ACME, 2300
714-045743-809 / UNER, FIXED OUTR, ACME, 2300
790-022847-003 / Senior operations metal bellows division prime mover
790-073306-009 / Metal bellows prime mover
678-031432-004 / Temperature control ring
810-048219-019 / PCB Assy pouls hold W/Syncro sortie
810-033620-005 / PCB Match INTFC, 3 CAP CONT
810-802969-002 / Heater filter
810-000839-005 / Node board
790-073306-109 / Metal bellows prime mover
853-089062-052, 853-265832-002 / RF Power
790-073306-009 / Metal bellows prime mover
770-068220-004 / Compact pneumatic cylinder
772-082235-003 / Bank regulator
772-016855-002 / Solenoid valve
772-082235-001 / Bank regulator
FTC-OIN-SSMA-2512 / Control fiber optic temperature sensor 666-045257-003 FGA-0172A
FTC-DIN-SSMA-2512-LU / Control 666-045257-003
853-044013-007 / KIY045 VME Box for 2300
715-800332-028 / ESC Facility plate
795-117113-002 / ESC Temp sensor
715-030576-303 L / TCP Coil TCCT Compatible assy
605-109114-001 / CPU Board computer
810-046015-009 / VIOP Phase III Assy
571-065780-704 / Gas box
571-065780-702 / Gas box
571-065780-704 / Gas box
796-029684-321, 796-029684-421 / Valve assembly
810-048219-019 REV B / PCB Board
853-002499-200 / DC Prove
666-045257-003 / Control fiber optic temperature sensor FGA-0172A, FTC-DIN-SSMA-2512
- / ESC Chuck
- / Control fiber optic temperature sensor FGA-0172A, FTC-OIN-SSMA-2512
666-045257-001 / Control fiber optic temperature sensor
810-800256-015 / PCBA, Node type 3
790-073306-109 / Metal bellows prime mover
790-022847-003 / Senior operations metal bellows division prime mover
660-119589-004 / Power architects PA-1629, Power supply
853-002499-200 / DC Prove
853-040482R525 / RF Auto match box
715-031733-003 / M21NSXC-LSS-SS-02 Powermax II
666-045257-001 / FTC-DIN-SSMA-2512 Fiber optic temperature sensor converter
571-065780-704 / Gas box
- / VERSYS Poly etch KIYO For 2300
810-107813-107, 810-107813-117, 810-107813-004 / ESC Power supply PCB Board
810-107813-107 / ESC Power supply PCB Board
790-073306-109, 790-073306-009 / Metal bellows prime mover
853-064940-206, 810-107813-206 / ESC HVBP Power supply
790-073306-009 / Metal bellows prime mover
790-022848-014 / Metal bellows prime mover
790-073306-109 / Metal bellows prime mover
0427-140 350-000427-140 / -
853-176823-200, SGMJV-04A3A-YA13 / Vector spindle
810-107813-014, 810-107813-004 / ESC Power supply PCB Board
715-050839-002 / HSG Chamber wall
02-321482-00 / E-HDSIOC E84AWCM
02-384638-00 / FE-HD EIOC E84 R SBR 3D
853-004605-005 / Cable
796-029684-321 / Valve assembly manifold
796-029684-421 / Valve assembly manifold
- / Robot arm calibration parts
853-017892-201 / Top plate
839-035038-001 / Gas feed une
796-010678-001 / Airlock gauge, HPM-2002-OBE-LM
03-364625-00 / VAC Robot C3WTSHMM23-364625-00
001-9114-01 / VCE Mapping sensor
853-049542-173 / Node board, 24 Channel, temperature controller
001-9010-03 / Vacuum cassette elevator ( Bellows type, UP-Seal type)
715-235579-001D / BLK Lower 1 STN ISO ALDOX VXT
765-430126-007 / Lift pin bellows
810-064624-521 / ESC Filter bicep II
810-102361-216 / Chamber MUX
853-150806-001 / EIOC CONTA MINI
605-064676-007 / VME CPU board
715-102250-003 / TM Airlock diffuser
810-046015-010 / VIOP III PCB
853-800085-015V / Etch VME Box for 2300
S-EB1-CBO-OO-01 / Hard anodizing wall uner
853-007861-934 / Air lock door assy
04212-AA48-AD09 / Transfer door gate
FGA-0172A / Fiber optic temperature converter FTC-DIN-SSMA-2512"
853-182680-105-REP / Spindle automation controller
853-176823-003 / Trust automation spindle assy
853-227249-001 / Vortex robot controller
61-311719-00 / Computer EC1 QNX Platform
826-151520-001 / Computer, MC4X, Ethernet, I/O Top tray, HDD 685-151520-102
790-022848-014 / Metal bellows prime mover
790-022847-003 / Metal bellows division prime mover
790-073306-009 / Metal bellows prime mover
790-073306-109 / Metal bellows prime mover
810-800256-107 / Node board
810-802902-207 / Mother board, Node 2
810-107813-206 / ESC Power supply PCB Board 810-064624-401
- / Wet clean, 12", EFEM
001-9114-01 / Wafer mapping sensor
810-107813-000 / ESC Power supply PCB Board 810-064624-401
571-033051-002 / 16-UNE IGS Gas box
571-065780-702, 571-065780-703, 571-065780-704, 571-065780-705 / Gas box
571-065780-704 / Gas box
02-321432-00 / E-HDSIOC E84 AWC Ethernet firmware
839-079052-701 / IGS Gas box
839-035038-001 / WLDMT, Gas valve, DBLCNTN, STONEHEN 1
HPM-2002-OBE-LM / Dual sensor vacuum gauge
853-900986-011 / PC
853-158271-101 / INTLK, 8 Channels leak detector, PCB
04-212-AA48-AD09 / Transfer door gate
810-107813-004 / ESC Power supply PCB Board
810-107813-206 / ESC Power supply PCB Board
810-107813-206 / ESC Power supply PCB Board.
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