Occasion MATTSON Millios #9223132 à vendre en France
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ID: 9223132
Taille de la plaquette: 12"
Single chamber RTP system, 12"
mS Anneal
Single chamber platform
Process capabiltiy for sd_anneal
HK-Anneals
Real time temperature measurement system
With closed loop control: 400°C to 1350°C
Top side temperature control
Oxygen sensor (Ntron type)
Facility monitoring
(6) Dummy stations / (6) Cooling stations
Signal tower at front side: (4) Colors
One set of documentation on CD-ROM
MCS With gem interface
Stand alone gui
MSEC Anneal pulse : 0.3ms - 2.5ms
Single power supply termination: 400V to 480V.
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