Occasion TEL / TOKYO ELECTRON Spare parts for ACT 12 #9293177 à vendre en France
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ID: 9293177
Make / Model / Description
YOKOGAWA / DR1200A00 / DD Servo actuator
YOKOGAWA / DR1200A00 / DD Servo actuator
PTI / PROGRESSIVE TECHNOLOGIES / 12612G01 / Automated exhaust sentry
RKC INSTRUMENT / REX-B870-CS1 / Temperature controller
RKC INSTRUMENT / REX-B870-CS1B / Temperature controller
YASKAWA / USAHEM-02-TE53 / Spin motor, 8"
YASKAWA / USAHEM-02-TE53 / Spin motor, 8"
NSK / XY-HRS055ZM123 / IRA Z Axis track
NSK / XY-HRS030ZM105 / CRA Z Axis track
TDK / MSE343B / Interface block DC power supply
NSK / ESA-J2006AF3-20 / Servo drive, θ theta axis, 12"
PANASONIC / CK88YP200V03 / Power unit PCB card
PANASONIC / MSD023A1XX / AC Servo driver MINAS, 12"
PANASONIC / MSD5AZA1Y / Driver unit PCB card, 50 W
PANASONIC / MSM042A5F / Servo motor, 8"
NSK / JS2006FN509 / Servo motor, 8"
NSK / JS1003FN506 / Servo motor, 8"
SHINYEI / THT-B121S3 / Humidity and temperature transmitter with THP-B4TW
KOGANEI / F-AVP125-19W / Pneumatic valve
KOGANEI / F-AVP070-6W / Pneumatic valve
YASUNAGA / YP-20V / Air purge pump
PANASONIC / 581B344B / Back-plane connector PCB
VEXTA / CSD5807N / Driver
TDK / TK011-90-A-00 / Interface board PCB
TAKADA / FJ39EB-X010N0 / CRA X Board PCB
NSK / E043ZZIF1-002 / PCB TIF Board
TAKADA / FJ39EB-T010N0 / CRA Board PCB
PANASONIC / MSM3AZA1N / Servo motor
LIEBERT / 4C13571G1 / Interface board PCB Rev.6, 8"
SANYO DENKI / PM-UPD1S06-20 / PM Driver
TAIYO MACHINERY / CN-Base / Back-plane interface board PCB
YASKAWA / SGDA-01APPY126 Servo drive servo pack
LAMBDA / JWS100-24A / DC Power supply module, 24 V, 4.5 Amps
VEXTA / 2980-193383-11 / Motor
VEXTA / CSD5807N-P-A11 / Motor
D1C-2203-K / High temperature hot plate, 12"
D1D-2029-K / Low temperature hot plate station, 12"
847 / Adhesion plate process station, 12"
844 / Low Temperature Hot Plate process station (LHP), 12"
2981-600314-11 / High Temperature Hot Plate process station (HHP), 12"
844 / Low Temperature Hot Plate process station (LHP), 12"
- / Interface Block Robotics Arm (IRA), 12"
877 / Cassette Block Robotics Arm (CRA), 12"
- / Interface Block Robotics Arm (IRA), 8"
847 / Adhesion process station, 8"
- / Interface Robotics Arm (IRA), 12"
845 / 5085-404315-17 / Chill Plate process station (CPL), 12"
- / Chill Plate process station (CPL), 12"
- / Interface Block Robotics Arm (IRA), 8"
- / Cassette Block Robotics Arm (CRA), 8"
845 / Chill Plate process station (CPL), 8"
846 / Chill Plate process station (CPL), 8"
845 / Chill Plate process station (CPL), 8"
849 / Chilling Hot Plate process station (CHP), 8"
849 / Chilling Hot Plate process station (CHP), 8"
849 / Chilling Hot Plate process (CHP), 8"
845 / Chill Plate process station (CPL), 8"
849 / Chilling Hot Plate process station (CHP), 8"
849 / Chilling Hot Plate process station (CHP), 8"
849 / Chilling Hot Plate process (CHP), 8"
849 / Chilling Hot Plate process (CHP), 8"
848 / Transition Chill Plate station right (TCP), 8"
384 / ADH Pin stand station, 8"
847 / Adhesion process station (ADH), 12"
847 / Adhesion process station (ADH),12"
848 / Transition Chill Plate station left (TCP), 8"
2985-411180-W6 / Cool plate module, 12"
848 / Transition Chill Plate process station left (TCP), 8"
847 / Adhesion plate process station (ADH), 12"
844 / Low Temperature Hot Plate process station (LHP), 12"
847 / Adhesion process station (ADH), 12"
849 / Chilling Hot Plate process (CHP), 8"
- / Interface Robotics Arm (IRA)
849 / Chilling Hot Plate process (CHP), 8"
- / Interface Block Robotics Arm (IRA), 8"
845 / Chill Plate Process Station (CPL), 12"
2985-429208-W4 / Sub unit adhesive module, 12"
2985-429208-W4 / Adhesive module base, 12"
847 / Adhesion Process station (ADH), 8"
2985-423760-W3 / Interface block cooling (IFB), 12"
2985-445336-W1 / Interface block cooling (IFB), 8"
847 / Adhesion process station, 12"
844 / Low temperature hot plate process station (LHP), 12"
2985-445336-W1 / Interface block cooling (IFB)
838 / Shuttle slider assembly (SHU), 12"
- / X Axis assy robotics arm, 12"
PRA / - / X Axis assy robotics arm, 8"
TMD002-X8 / Solvent buffer tank assembly
HTE-OA1-B-11 / Oven board with PCB, 12"
TDK MSE181E / Interface block DC power supply
HTE-OV1-11-B / Oven I/O board PCB, 8"
2985-469941-W1 / Process block robotics arm X-axis
2985-449464-W3 / SHU Wafer shuttle slider assembly
PANASONIC / 581B357C / CPU Processor PCB Card
- / Stepper interface stage assembly stand
383 / ADH Pin stand assembly, 8"
HTE-OA1-B-11 / Oven with board, 12"
AP9E-0318C-12 / PCB Assembly
848 / Transition Chill Plate station left (TCP), 12"
HTE-OV1-B-11 / Oven I/O board
2985-438909-W1 / Develop cup assembly
2981-600618-11 / I/O Display
LPC-T0007A-11 / Load port assembly
PANASONIC / MSD3AZA1Y04 / X Driver unit
AP9E-0318C-12 / Motor I/O board PCB
2985-461034-W1 / Cup base assembly
2985-490048-W8 / Motor flange assembly
2985-406657-W1 / Dev scan (12L) assy Left, 12"
- / Develop process station air valve assembly, 12"
- / Develop process station sliding door set of 4
HTE-PUM-A-11 / Pump with board pcb
HTE-TGR-B-W1 / Ghost repeater board PCB
HTE-TGR-A-11 / Ghost repeater board, 12"
HTE-IFA-B-W1 / IFB with board PCB
EHX / Box pressure manometer panel
- / Developer
381 / LHP EXT Cover station frame
- / Air valve assembly develop process station, 12"
TMD002-X8 / Buffer tank assembly
2910-304205-11 / Rinse bath assembly
- / Pneumatic control panel (PHP), 12"
2987-416025-W3 / X-axis assembly
- / Pressure control panel ejector drive / HP cooling (PHP), 8"
CPC-T0001A-13 / Chemical I/O board PCB
- / Interface rollers and interface bracket
HTE-PRB-A-11 / Panel I/O board PCB
- / Wafer transport stepper interface, 8"
2985-413414-W4 / Slider assembly (SHU), 12"
LPC-T0007A-11 / Load port with board PCB
F-T100-3 / Pump
2981-600534-11 / Connect BLT/L board PCB
2981-600832-11 / Board, I/O PCB SP001, 12"
F-T100-2 / Pump
- / Cup wash disc, 12"
2985-412389-W1 / 12-R Nozzle bath assembly
2910-100464-11 / Shutter
HTE-PUC-A-11 / Pump connector board PCB
- / Cup wash disc assembly, 8"
2981-600410-11 / PRA Z Board PCB
EPC-T0091A-11 / EXT IF Board PCB, 12"
2981-600418-11 / I/F Board PCB, 12"
HA-039 / Board, 12"
2981-600409-11 / PRA X Board PCB
2981-600408-12 / PRA Base board
SH5M015T1 / Filter assembly
HA-010 / Board
2981-600514-11 / EXT DIO Board PCB
2981-600310-12 / DC/DC Converter board PCB
RL06EX-2 / Relay board PCB
2981-600386-13 / EXT DIO board PCB
2985-415077-W2 / Spin shutter (12-L) assy, 12"
PPC-T0006A-11 / PLD (CHEMI) PCB
2981-600374-11 FDD Board PCB
LPC-T0009A-11 / Load Port DC/DC converter board PCB
2981-600418-11 / I/F Board
PPC-T0006A-11 / PLD (CHEMI) PCB
PPC-T0006A-11 / PLD (CHEMI)
2981-600395-11 / I/F Board
CKD / AMD11-X1262 / Valve
MA-13005 / COM SW Interface panel assembly PCB
2981-600001-12 / Ghost terminator board PCB
SH5M015T1 / Photoresist filter assembly
2981-600550-11 / I/O Board
MA02702 / LCD Board PCB
MA-13005 / COM SW board PCB, 12"
- / Fuse block, 8"
2981-600355-14 / STP IF Board
- / Interface block roller
2981-600552-11 / C/S Fan connection board PCB, 12"
CPC-G229A01B-11 / Pump connection board
SH5M015T1 / Photoresist filter
LPC-T0008A-11 Load port connection board
2981-600328-11 / DC Power branch board PCB
2981-600595-11 / Interface board PCB.
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