Utilisé ALCATEL / ADIXEN / PFEIFFER SCM 650 #9258696 à vendre
ID#: 9258696
Sputtering system
RF/DC Sputtering
Ionic cleaning
Cathodes: (2) Magnetron targets, 8"
Substrate transport load lock: 6" Diameter substrates
Substrate holder:
(4) Stations
(6) Indexed positions
(4) Transfers with (2) sputtering positions
Rotation: 1 to 30 rpm
Vertical translation: 50 to 100 mm
Shutter: 1 3/4 Automatic shutter
Generators:
RF Generator (2000W For the targets 1 and 2 and substrate holder)
DC Generator (3000W For the targets 1 and 2 Gas lines (2) Lines).
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Fabricants:
ALCATEL / ADIXEN / PFEIFFERMaquette:
SCM 650Catégorie:
SPUTTERING SYSTEMSDétails de l'équipement:
RF/DC Sputtering
Ionic cleaning
Cathodes: (2) Magnetron targets, 8"
Substrate transport load lock: 6" Diameter substrates
Substrate holder:
(4) Stations
(6) Indexed positions
(4) Transfers with (2) sputtering positions
Rotation: 1 to 30 rpm
Vertical translation: 50 to 100 mm
Shutter: 1 3/4 Automatic shutter
Generators:
RF Generator (2000W For the targets 1 and 2 and substrate holder)
DC Generator (3000W For the targets 1 and 2 Gas lines (2) Lines).
