Occasion AMAT / APPLIED MATERIALS Reflexion 3600 #293758301 à vendre en France
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ID: 293758301
Taille de la plaquette: 12"
CMP Systems, 12"
(4) FI Load ports
Wafer shape: Notch
Heater lamp
MESA cleaner type
25-Wafer FOUP
Platen 1, 2, 3:
Type: Pad platen (PFA Coated platen)
Pad: IC 1010
Endpoint (ISRM): Motor torque / Full scan / ISCAN
Pad conditioner: Screw type disc
Polisher options:
Polishing head: Profiler heads
Upper pneumatics assembly: 4 Port UPA
Skins for polisher: Clear windows
Pad wafer loss sensor: Dark pad sensor
KAWASAKI Wet robot
Slurry delivery:
Slurry delivery system: 2 Slurries pump type
Slurry Dispense Arm: Fixed
Cleaner options:
Delivery Tank: Mega Sonics
Delivery Type: Pressurized
Scrubber module 1:
Brush type: Taxwise PVA
Delivery type: Pressurized low flow
Scrubber module 2:
Brush type: Taxwise PVA
Delivery type: Pressurized low flow
Power supply: 200-230 V, 30mA, 50/60 Hz.
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