Occasion EVATEC Solaris S151 #293752399 à vendre en France
URL copiée avec succès !
ID: 293752399
Style Vintage: 2007
Multi-chamber sputtering system
(6) Cathode chambers:
(2) Sources with diameter of 30 cm each
Heating source
(3) Multi-sources
Substrate sizes and throughput (for typical configurations):
Processable substrates with ∅ 200 mm or 156 mm × 156 mm edge length
Maximum thickness: 2 mm
Capacity: Max. 1200 substrates per hour
Cycle time < 3 seconds.
Media supply:
Gases: Argon, Oxygen, forming gas (Ar:H2 = 95:5), Nitrogen
Compressed air
Cooling water
Exhaust air
2007 vintage.
Il n'y a pas encore de critiques